3/7/2011	9:21:29 AM	Helium MFC set to  100.000000
3/7/2011	9:21:30 AM	Helium valve opened
3/7/2011	9:22:04 AM	Tube furnace set to 100
3/7/2011	9:22:09 AM	Helium valve closed
3/7/2011	9:22:51 AM	Main Vac valve closed
3/7/2011	9:22:54 AM	Bypass valve closed
3/7/2011	9:22:59 AM	Bypass valve opened
3/7/2011	9:23:00 AM	Main Vac valve opened
3/7/2011	9:23:21 AM	Recipe started at 9:23 AM
3/7/2011	9:23:21 AM	Helium valve closed
3/7/2011	9:23:21 AM	BCl3 valve closed
3/7/2011	9:23:21 AM	PH3 valve closed
3/7/2011	9:23:21 AM	SiCl4 pre valve closed
3/7/2011	9:23:21 AM	SiCl4 post valve closed
3/7/2011	9:23:21 AM	Main Vac valve closed
3/7/2011	9:23:21 AM	Bypass valve closed
3/7/2011	9:23:21 AM	Bubbler valve closed
3/7/2011	9:23:21 AM	H2 valve opened
3/7/2011	9:23:21 AM	Helium MFC set to  0.000000
3/7/2011	9:23:21 AM	H2 MFC set to  500.000000
3/7/2011	9:23:21 AM	BCl3 MFC set to  0.000000
3/7/2011	9:23:21 AM	PHl3 MFC set to  0.000000
3/7/2011	9:23:21 AM	SiCl4 MFC set to  0.000000
3/7/2011	9:23:21 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:23:21 AM	Tube furnace set to 200
3/7/2011	9:24:42 AM	Helium valve closed
3/7/2011	9:24:42 AM	BCl3 valve closed
3/7/2011	9:24:42 AM	PH3 valve closed
3/7/2011	9:24:42 AM	SiCl4 pre valve closed
3/7/2011	9:24:42 AM	SiCl4 post valve closed
3/7/2011	9:24:42 AM	Main Vac valve closed
3/7/2011	9:24:42 AM	Bypass valve closed
3/7/2011	9:24:42 AM	H2 valve opened
3/7/2011	9:24:42 AM	Bubbler valve opened
3/7/2011	9:24:42 AM	Helium MFC set to  0.000000
3/7/2011	9:24:42 AM	H2 MFC set to  400.000000
3/7/2011	9:24:42 AM	BCl3 MFC set to  0.000000
3/7/2011	9:24:42 AM	PHl3 MFC set to  0.000000
3/7/2011	9:24:42 AM	SiCl4 MFC set to  0.000000
3/7/2011	9:24:42 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:24:42 AM	Tube furnace set to 1002
3/7/2011	9:41:22 AM	Helium valve closed
3/7/2011	9:41:22 AM	BCl3 valve closed
3/7/2011	9:41:22 AM	PH3 valve closed
3/7/2011	9:41:22 AM	SiCl4 pre valve closed
3/7/2011	9:41:22 AM	SiCl4 post valve closed
3/7/2011	9:41:22 AM	Main Vac valve closed
3/7/2011	9:41:22 AM	Bypass valve closed
3/7/2011	9:41:22 AM	H2 valve opened
3/7/2011	9:41:22 AM	Bubbler valve opened
3/7/2011	9:41:22 AM	Helium MFC set to  0.000000
3/7/2011	9:41:22 AM	H2 MFC set to  400.000000
3/7/2011	9:41:22 AM	BCl3 MFC set to  0.000000
3/7/2011	9:41:22 AM	PHl3 MFC set to  0.000000
3/7/2011	9:41:22 AM	SiCl4 MFC set to  0.000000
3/7/2011	9:41:22 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:41:22 AM	Tube furnace set to 1000
3/7/2011	9:45:42 AM	Helium valve closed
3/7/2011	9:45:42 AM	PH3 valve closed
3/7/2011	9:45:42 AM	Main Vac valve closed
3/7/2011	9:45:42 AM	Bypass valve closed
3/7/2011	9:45:42 AM	H2 valve opened
3/7/2011	9:45:42 AM	BCl3 valve opened
3/7/2011	9:45:42 AM	SiCl4 pre valve opened
3/7/2011	9:45:42 AM	SiCl4 post valve opened
3/7/2011	9:45:42 AM	Bubbler valve opened
3/7/2011	9:45:42 AM	Helium MFC set to  0.000000
3/7/2011	9:45:42 AM	H2 MFC set to  500.000000
3/7/2011	9:45:42 AM	BCl3 MFC set to  2.500000
3/7/2011	9:45:42 AM	PHl3 MFC set to  0.000000
3/7/2011	9:45:42 AM	SiCl4 MFC set to  50.000000
3/7/2011	9:45:42 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:45:42 AM	Tube furnace set to 1000
3/7/2011	10:05:42 AM	Helium valve closed
3/7/2011	10:05:42 AM	BCl3 valve closed
3/7/2011	10:05:42 AM	PH3 valve closed
3/7/2011	10:05:42 AM	SiCl4 pre valve closed
3/7/2011	10:05:42 AM	SiCl4 post valve closed
3/7/2011	10:05:42 AM	Main Vac valve closed
3/7/2011	10:05:42 AM	Bypass valve closed
3/7/2011	10:05:42 AM	H2 valve opened
3/7/2011	10:05:42 AM	Bubbler valve opened
3/7/2011	10:05:42 AM	Helium MFC set to  0.000000
3/7/2011	10:05:42 AM	H2 MFC set to  500.000000
3/7/2011	10:05:42 AM	BCl3 MFC set to  0.000000
3/7/2011	10:05:42 AM	PHl3 MFC set to  0.000000
3/7/2011	10:05:42 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:05:42 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:05:43 AM	Tube furnace set to 0
3/7/2011	10:08:34 AM	H2 valve closed
3/7/2011	10:08:34 AM	BCl3 valve closed
3/7/2011	10:08:34 AM	PH3 valve closed
3/7/2011	10:08:34 AM	SiCl4 pre valve closed
3/7/2011	10:08:34 AM	SiCl4 post valve closed
3/7/2011	10:08:34 AM	Main Vac valve closed
3/7/2011	10:08:34 AM	Bypass valve closed
3/7/2011	10:08:34 AM	Helium valve opened
3/7/2011	10:08:34 AM	Bubbler valve opened
3/7/2011	10:08:34 AM	Helium MFC set to  400.000000
3/7/2011	10:08:34 AM	H2 MFC set to  0.000000
3/7/2011	10:08:34 AM	BCl3 MFC set to  0.000000
3/7/2011	10:08:34 AM	PHl3 MFC set to  0.000000
3/7/2011	10:08:34 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:08:34 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:08:34 AM	Tube furnace set to 0
3/7/2011	10:28:34 AM	Helium valve closed
3/7/2011	10:28:34 AM	H2 valve closed
3/7/2011	10:28:34 AM	BCl3 valve closed
3/7/2011	10:28:34 AM	PH3 valve closed
3/7/2011	10:28:34 AM	SiCl4 pre valve closed
3/7/2011	10:28:34 AM	SiCl4 post valve closed
3/7/2011	10:28:34 AM	Main Vac valve closed
3/7/2011	10:28:34 AM	Bypass valve closed
3/7/2011	10:28:34 AM	Bubbler valve closed
3/7/2011	10:28:34 AM	Helium MFC set to  0.000000
3/7/2011	10:28:34 AM	H2 MFC set to  0.000000
3/7/2011	10:28:34 AM	BCl3 MFC set to  0.000000
3/7/2011	10:28:34 AM	PHl3 MFC set to  0.000000
3/7/2011	10:28:34 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:28:34 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:28:35 AM	Tube furnace set to 0
3/7/2011	10:28:35 AM	Run finished at 10:28 AM
3/7/2011	10:31:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	10:31:18 AM	Recipe started at 10:31 AM
3/7/2011	10:31:18 AM	Helium valve closed
3/7/2011	10:31:18 AM	H2 valve closed
3/7/2011	10:31:18 AM	BCl3 valve closed
3/7/2011	10:31:18 AM	PH3 valve closed
3/7/2011	10:31:18 AM	SiCl4 pre valve closed
3/7/2011	10:31:18 AM	SiCl4 post valve closed
3/7/2011	10:31:18 AM	Main Vac valve closed
3/7/2011	10:31:18 AM	Bubbler valve closed
3/7/2011	10:31:18 AM	Bypass valve opened
3/7/2011	10:31:18 AM	Helium MFC set to  0.000000
3/7/2011	10:31:18 AM	H2 MFC set to  0.000000
3/7/2011	10:31:18 AM	BCl3 MFC set to  0.000000
3/7/2011	10:31:18 AM	PHl3 MFC set to  0.000000
3/7/2011	10:31:18 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:31:18 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:31:19 AM	Tube furnace set to 0
3/7/2011	10:31:50 AM	Helium valve closed
3/7/2011	10:31:50 AM	H2 valve closed
3/7/2011	10:31:50 AM	BCl3 valve closed
3/7/2011	10:31:50 AM	PH3 valve closed
3/7/2011	10:31:50 AM	SiCl4 pre valve closed
3/7/2011	10:31:50 AM	SiCl4 post valve closed
3/7/2011	10:31:50 AM	Bubbler valve closed
3/7/2011	10:31:50 AM	Main Vac valve opened
3/7/2011	10:31:50 AM	Bypass valve opened
3/7/2011	10:31:50 AM	Helium MFC set to  0.000000
3/7/2011	10:31:50 AM	H2 MFC set to  0.000000
3/7/2011	10:31:50 AM	BCl3 MFC set to  0.000000
3/7/2011	10:31:50 AM	PHl3 MFC set to  0.000000
3/7/2011	10:31:50 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:31:50 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:31:50 AM	Tube furnace set to 0
3/7/2011	10:31:50 AM	Run finished at 10:31 AM
3/7/2011	10:31:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	10:32:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	10:32:51 AM	Recipe started at 10:32 AM
3/7/2011	10:32:51 AM	Helium valve closed
3/7/2011	10:32:51 AM	H2 valve closed
3/7/2011	10:32:51 AM	BCl3 valve closed
3/7/2011	10:32:51 AM	PH3 valve closed
3/7/2011	10:32:51 AM	SiCl4 pre valve closed
3/7/2011	10:32:51 AM	SiCl4 post valve closed
3/7/2011	10:32:51 AM	Main Vac valve closed
3/7/2011	10:32:51 AM	Bubbler valve closed
3/7/2011	10:32:51 AM	Bypass valve opened
3/7/2011	10:32:51 AM	Helium MFC set to  0.000000
3/7/2011	10:32:51 AM	H2 MFC set to  0.000000
3/7/2011	10:32:51 AM	BCl3 MFC set to  0.000000
3/7/2011	10:32:51 AM	PHl3 MFC set to  0.000000
3/7/2011	10:32:51 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:32:51 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:32:51 AM	Tube furnace set to 0
3/7/2011	10:32:51 AM	Helium valve closed
3/7/2011	10:32:51 AM	H2 valve closed
3/7/2011	10:32:51 AM	BCl3 valve closed
3/7/2011	10:32:51 AM	PH3 valve closed
3/7/2011	10:32:51 AM	SiCl4 pre valve closed
3/7/2011	10:32:51 AM	SiCl4 post valve closed
3/7/2011	10:32:51 AM	Bubbler valve closed
3/7/2011	10:32:51 AM	Main Vac valve opened
3/7/2011	10:32:51 AM	Bypass valve opened
3/7/2011	10:32:51 AM	Helium MFC set to  0.000000
3/7/2011	10:32:51 AM	H2 MFC set to  0.000000
3/7/2011	10:32:51 AM	BCl3 MFC set to  0.000000
3/7/2011	10:32:51 AM	PHl3 MFC set to  0.000000
3/7/2011	10:32:51 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:32:51 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:32:51 AM	Tube furnace set to 0
3/7/2011	10:33:13 AM	H2 valve closed
3/7/2011	10:33:13 AM	BCl3 valve closed
3/7/2011	10:33:13 AM	PH3 valve closed
3/7/2011	10:33:13 AM	SiCl4 pre valve closed
3/7/2011	10:33:13 AM	SiCl4 post valve closed
3/7/2011	10:33:13 AM	Bubbler valve closed
3/7/2011	10:33:13 AM	Helium valve opened
3/7/2011	10:33:13 AM	Main Vac valve opened
3/7/2011	10:33:13 AM	Bypass valve opened
3/7/2011	10:33:13 AM	Helium MFC set to  100.000000
3/7/2011	10:33:13 AM	H2 MFC set to  0.000000
3/7/2011	10:33:13 AM	BCl3 MFC set to  0.000000
3/7/2011	10:33:14 AM	PHl3 MFC set to  0.000000
3/7/2011	10:33:14 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:33:14 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:33:14 AM	Tube furnace set to 0
3/7/2011	10:34:14 AM	Helium valve closed
3/7/2011	10:34:14 AM	H2 valve closed
3/7/2011	10:34:14 AM	BCl3 valve closed
3/7/2011	10:34:14 AM	PH3 valve closed
3/7/2011	10:34:14 AM	SiCl4 pre valve closed
3/7/2011	10:34:14 AM	SiCl4 post valve closed
3/7/2011	10:34:14 AM	Bubbler valve closed
3/7/2011	10:34:14 AM	Main Vac valve opened
3/7/2011	10:34:14 AM	Bypass valve opened
3/7/2011	10:34:14 AM	Helium MFC set to  0.000000
3/7/2011	10:34:14 AM	H2 MFC set to  0.000000
3/7/2011	10:34:14 AM	BCl3 MFC set to  0.000000
3/7/2011	10:34:14 AM	PHl3 MFC set to  0.000000
3/7/2011	10:34:14 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:34:14 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:34:14 AM	Tube furnace set to 0
3/7/2011	10:35:14 AM	H2 valve closed
3/7/2011	10:35:14 AM	BCl3 valve closed
3/7/2011	10:35:14 AM	PH3 valve closed
3/7/2011	10:35:14 AM	SiCl4 pre valve closed
3/7/2011	10:35:14 AM	SiCl4 post valve closed
3/7/2011	10:35:14 AM	Bubbler valve closed
3/7/2011	10:35:14 AM	Helium valve opened
3/7/2011	10:35:14 AM	Main Vac valve opened
3/7/2011	10:35:14 AM	Bypass valve opened
3/7/2011	10:35:14 AM	Helium MFC set to  100.000000
3/7/2011	10:35:14 AM	H2 MFC set to  0.000000
3/7/2011	10:35:14 AM	BCl3 MFC set to  0.000000
3/7/2011	10:35:14 AM	PHl3 MFC set to  0.000000
3/7/2011	10:35:14 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:35:14 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:35:14 AM	Tube furnace set to 0
3/7/2011	10:36:14 AM	Helium valve closed
3/7/2011	10:36:14 AM	H2 valve closed
3/7/2011	10:36:14 AM	BCl3 valve closed
3/7/2011	10:36:14 AM	PH3 valve closed
3/7/2011	10:36:14 AM	SiCl4 pre valve closed
3/7/2011	10:36:14 AM	SiCl4 post valve closed
3/7/2011	10:36:14 AM	Bubbler valve closed
3/7/2011	10:36:14 AM	Main Vac valve opened
3/7/2011	10:36:14 AM	Bypass valve opened
3/7/2011	10:36:14 AM	Helium MFC set to  0.000000
3/7/2011	10:36:14 AM	H2 MFC set to  0.000000
3/7/2011	10:36:14 AM	BCl3 MFC set to  0.000000
3/7/2011	10:36:14 AM	PHl3 MFC set to  0.000000
3/7/2011	10:36:14 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:36:14 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:36:14 AM	Tube furnace set to 0
3/7/2011	10:37:14 AM	H2 valve closed
3/7/2011	10:37:14 AM	BCl3 valve closed
3/7/2011	10:37:14 AM	PH3 valve closed
3/7/2011	10:37:14 AM	SiCl4 pre valve closed
3/7/2011	10:37:14 AM	SiCl4 post valve closed
3/7/2011	10:37:14 AM	Bubbler valve closed
3/7/2011	10:37:14 AM	Helium valve opened
3/7/2011	10:37:14 AM	Main Vac valve opened
3/7/2011	10:37:14 AM	Bypass valve opened
3/7/2011	10:37:14 AM	Helium MFC set to  100.000000
3/7/2011	10:37:14 AM	H2 MFC set to  0.000000
3/7/2011	10:37:14 AM	BCl3 MFC set to  0.000000
3/7/2011	10:37:14 AM	PHl3 MFC set to  0.000000
3/7/2011	10:37:14 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:37:14 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:37:14 AM	Tube furnace set to 0
3/7/2011	10:38:14 AM	Helium valve closed
3/7/2011	10:38:14 AM	H2 valve closed
3/7/2011	10:38:14 AM	BCl3 valve closed
3/7/2011	10:38:14 AM	PH3 valve closed
3/7/2011	10:38:14 AM	SiCl4 pre valve closed
3/7/2011	10:38:14 AM	SiCl4 post valve closed
3/7/2011	10:38:14 AM	Bubbler valve closed
3/7/2011	10:38:14 AM	Main Vac valve opened
3/7/2011	10:38:14 AM	Bypass valve opened
3/7/2011	10:38:14 AM	Helium MFC set to  0.000000
3/7/2011	10:38:14 AM	H2 MFC set to  0.000000
3/7/2011	10:38:14 AM	BCl3 MFC set to  0.000000
3/7/2011	10:38:14 AM	PHl3 MFC set to  0.000000
3/7/2011	10:38:14 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:38:14 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:38:15 AM	Tube furnace set to 0
3/7/2011	10:39:15 AM	H2 valve closed
3/7/2011	10:39:15 AM	BCl3 valve closed
3/7/2011	10:39:15 AM	PH3 valve closed
3/7/2011	10:39:15 AM	SiCl4 pre valve closed
3/7/2011	10:39:15 AM	SiCl4 post valve closed
3/7/2011	10:39:15 AM	Bubbler valve closed
3/7/2011	10:39:15 AM	Helium valve opened
3/7/2011	10:39:15 AM	Main Vac valve opened
3/7/2011	10:39:15 AM	Bypass valve opened
3/7/2011	10:39:15 AM	Helium MFC set to  100.000000
3/7/2011	10:39:15 AM	H2 MFC set to  0.000000
3/7/2011	10:39:15 AM	BCl3 MFC set to  0.000000
3/7/2011	10:39:15 AM	PHl3 MFC set to  0.000000
3/7/2011	10:39:15 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:39:15 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:39:15 AM	Tube furnace set to 0
3/7/2011	10:40:15 AM	Helium valve closed
3/7/2011	10:40:15 AM	H2 valve closed
3/7/2011	10:40:15 AM	BCl3 valve closed
3/7/2011	10:40:15 AM	PH3 valve closed
3/7/2011	10:40:15 AM	SiCl4 pre valve closed
3/7/2011	10:40:15 AM	SiCl4 post valve closed
3/7/2011	10:40:15 AM	Bubbler valve closed
3/7/2011	10:40:15 AM	Main Vac valve opened
3/7/2011	10:40:15 AM	Bypass valve opened
3/7/2011	10:40:15 AM	Helium MFC set to  0.000000
3/7/2011	10:40:15 AM	H2 MFC set to  0.000000
3/7/2011	10:40:15 AM	BCl3 MFC set to  0.000000
3/7/2011	10:40:15 AM	PHl3 MFC set to  0.000000
3/7/2011	10:40:15 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:40:15 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:40:15 AM	Tube furnace set to 0
3/7/2011	10:41:15 AM	H2 valve closed
3/7/2011	10:41:15 AM	BCl3 valve closed
3/7/2011	10:41:15 AM	PH3 valve closed
3/7/2011	10:41:15 AM	SiCl4 pre valve closed
3/7/2011	10:41:15 AM	SiCl4 post valve closed
3/7/2011	10:41:15 AM	Bubbler valve closed
3/7/2011	10:41:15 AM	Helium valve opened
3/7/2011	10:41:15 AM	Main Vac valve opened
3/7/2011	10:41:15 AM	Bypass valve opened
3/7/2011	10:41:15 AM	Helium MFC set to  100.000000
3/7/2011	10:41:15 AM	H2 MFC set to  0.000000
3/7/2011	10:41:15 AM	BCl3 MFC set to  0.000000
3/7/2011	10:41:15 AM	PHl3 MFC set to  0.000000
3/7/2011	10:41:15 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:41:15 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:41:15 AM	Tube furnace set to 0
3/7/2011	10:42:15 AM	Helium valve closed
3/7/2011	10:42:15 AM	H2 valve closed
3/7/2011	10:42:15 AM	BCl3 valve closed
3/7/2011	10:42:15 AM	PH3 valve closed
3/7/2011	10:42:15 AM	SiCl4 pre valve closed
3/7/2011	10:42:15 AM	SiCl4 post valve closed
3/7/2011	10:42:15 AM	Bubbler valve closed
3/7/2011	10:42:15 AM	Main Vac valve opened
3/7/2011	10:42:15 AM	Bypass valve opened
3/7/2011	10:42:15 AM	Helium MFC set to  0.000000
3/7/2011	10:42:15 AM	H2 MFC set to  0.000000
3/7/2011	10:42:15 AM	BCl3 MFC set to  0.000000
3/7/2011	10:42:15 AM	PHl3 MFC set to  0.000000
3/7/2011	10:42:15 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:42:15 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:42:15 AM	Tube furnace set to 0
3/7/2011	10:43:15 AM	H2 valve closed
3/7/2011	10:43:15 AM	BCl3 valve closed
3/7/2011	10:43:15 AM	PH3 valve closed
3/7/2011	10:43:15 AM	SiCl4 pre valve closed
3/7/2011	10:43:15 AM	SiCl4 post valve closed
3/7/2011	10:43:15 AM	Bubbler valve closed
3/7/2011	10:43:15 AM	Helium valve opened
3/7/2011	10:43:15 AM	Main Vac valve opened
3/7/2011	10:43:15 AM	Bypass valve opened
3/7/2011	10:43:15 AM	Helium MFC set to  100.000000
3/7/2011	10:43:15 AM	H2 MFC set to  0.000000
3/7/2011	10:43:15 AM	BCl3 MFC set to  0.000000
3/7/2011	10:43:15 AM	PHl3 MFC set to  0.000000
3/7/2011	10:43:15 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:43:15 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:43:16 AM	Tube furnace set to 0
3/7/2011	10:44:16 AM	Helium valve closed
3/7/2011	10:44:16 AM	H2 valve closed
3/7/2011	10:44:16 AM	BCl3 valve closed
3/7/2011	10:44:16 AM	PH3 valve closed
3/7/2011	10:44:16 AM	SiCl4 pre valve closed
3/7/2011	10:44:16 AM	SiCl4 post valve closed
3/7/2011	10:44:16 AM	Bubbler valve closed
3/7/2011	10:44:16 AM	Main Vac valve opened
3/7/2011	10:44:16 AM	Bypass valve opened
3/7/2011	10:44:16 AM	Helium MFC set to  0.000000
3/7/2011	10:44:16 AM	H2 MFC set to  0.000000
3/7/2011	10:44:16 AM	BCl3 MFC set to  0.000000
3/7/2011	10:44:16 AM	PHl3 MFC set to  0.000000
3/7/2011	10:44:16 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:44:16 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:44:16 AM	Tube furnace set to 0
3/7/2011	10:45:16 AM	H2 valve closed
3/7/2011	10:45:16 AM	BCl3 valve closed
3/7/2011	10:45:16 AM	PH3 valve closed
3/7/2011	10:45:16 AM	SiCl4 pre valve closed
3/7/2011	10:45:16 AM	SiCl4 post valve closed
3/7/2011	10:45:16 AM	Bubbler valve closed
3/7/2011	10:45:16 AM	Helium valve opened
3/7/2011	10:45:16 AM	Main Vac valve opened
3/7/2011	10:45:16 AM	Bypass valve opened
3/7/2011	10:45:16 AM	Helium MFC set to  100.000000
3/7/2011	10:45:16 AM	H2 MFC set to  0.000000
3/7/2011	10:45:16 AM	BCl3 MFC set to  0.000000
3/7/2011	10:45:16 AM	PHl3 MFC set to  0.000000
3/7/2011	10:45:16 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:45:16 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:45:16 AM	Tube furnace set to 0
3/7/2011	10:46:16 AM	Helium valve closed
3/7/2011	10:46:16 AM	H2 valve closed
3/7/2011	10:46:16 AM	BCl3 valve closed
3/7/2011	10:46:16 AM	PH3 valve closed
3/7/2011	10:46:16 AM	SiCl4 pre valve closed
3/7/2011	10:46:16 AM	SiCl4 post valve closed
3/7/2011	10:46:16 AM	Bubbler valve closed
3/7/2011	10:46:16 AM	Main Vac valve opened
3/7/2011	10:46:16 AM	Bypass valve opened
3/7/2011	10:46:16 AM	Helium MFC set to  0.000000
3/7/2011	10:46:16 AM	H2 MFC set to  0.000000
3/7/2011	10:46:16 AM	BCl3 MFC set to  0.000000
3/7/2011	10:46:16 AM	PHl3 MFC set to  0.000000
3/7/2011	10:46:16 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:46:16 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:46:16 AM	Tube furnace set to 0
3/7/2011	10:47:16 AM	H2 valve closed
3/7/2011	10:47:16 AM	BCl3 valve closed
3/7/2011	10:47:16 AM	PH3 valve closed
3/7/2011	10:47:16 AM	SiCl4 pre valve closed
3/7/2011	10:47:16 AM	SiCl4 post valve closed
3/7/2011	10:47:16 AM	Bubbler valve closed
3/7/2011	10:47:16 AM	Helium valve opened
3/7/2011	10:47:16 AM	Main Vac valve opened
3/7/2011	10:47:16 AM	Bypass valve opened
3/7/2011	10:47:16 AM	Helium MFC set to  100.000000
3/7/2011	10:47:16 AM	H2 MFC set to  0.000000
3/7/2011	10:47:16 AM	BCl3 MFC set to  0.000000
3/7/2011	10:47:16 AM	PHl3 MFC set to  0.000000
3/7/2011	10:47:16 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:47:16 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:47:16 AM	Tube furnace set to 0
3/7/2011	10:48:16 AM	Helium valve closed
3/7/2011	10:48:16 AM	H2 valve closed
3/7/2011	10:48:16 AM	BCl3 valve closed
3/7/2011	10:48:16 AM	PH3 valve closed
3/7/2011	10:48:16 AM	SiCl4 pre valve closed
3/7/2011	10:48:16 AM	SiCl4 post valve closed
3/7/2011	10:48:16 AM	Bubbler valve closed
3/7/2011	10:48:16 AM	Main Vac valve opened
3/7/2011	10:48:16 AM	Bypass valve opened
3/7/2011	10:48:16 AM	Helium MFC set to  0.000000
3/7/2011	10:48:16 AM	H2 MFC set to  0.000000
3/7/2011	10:48:16 AM	BCl3 MFC set to  0.000000
3/7/2011	10:48:16 AM	PHl3 MFC set to  0.000000
3/7/2011	10:48:16 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:48:16 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:48:17 AM	Tube furnace set to 0
3/7/2011	10:49:17 AM	H2 valve closed
3/7/2011	10:49:17 AM	BCl3 valve closed
3/7/2011	10:49:17 AM	PH3 valve closed
3/7/2011	10:49:17 AM	SiCl4 pre valve closed
3/7/2011	10:49:17 AM	SiCl4 post valve closed
3/7/2011	10:49:17 AM	Bubbler valve closed
3/7/2011	10:49:17 AM	Helium valve opened
3/7/2011	10:49:17 AM	Main Vac valve opened
3/7/2011	10:49:17 AM	Bypass valve opened
3/7/2011	10:49:17 AM	Helium MFC set to  100.000000
3/7/2011	10:49:17 AM	H2 MFC set to  0.000000
3/7/2011	10:49:17 AM	BCl3 MFC set to  0.000000
3/7/2011	10:49:17 AM	PHl3 MFC set to  0.000000
3/7/2011	10:49:17 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:49:17 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:49:17 AM	Tube furnace set to 0
3/7/2011	10:50:02 AM	Helium valve closed
3/7/2011	10:50:02 AM	H2 valve closed
3/7/2011	10:50:02 AM	BCl3 valve closed
3/7/2011	10:50:02 AM	PH3 valve closed
3/7/2011	10:50:02 AM	SiCl4 pre valve closed
3/7/2011	10:50:02 AM	SiCl4 post valve closed
3/7/2011	10:50:02 AM	Bubbler valve closed
3/7/2011	10:50:02 AM	Main Vac valve opened
3/7/2011	10:50:02 AM	Bypass valve opened
3/7/2011	10:50:02 AM	Helium MFC set to  0.000000
3/7/2011	10:50:02 AM	H2 MFC set to  0.000000
3/7/2011	10:50:02 AM	BCl3 MFC set to  0.000000
3/7/2011	10:50:02 AM	PHl3 MFC set to  0.000000
3/7/2011	10:50:02 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:50:02 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:50:02 AM	Tube furnace set to 0
3/7/2011	10:51:02 AM	H2 valve closed
3/7/2011	10:51:02 AM	BCl3 valve closed
3/7/2011	10:51:02 AM	PH3 valve closed
3/7/2011	10:51:02 AM	SiCl4 pre valve closed
3/7/2011	10:51:02 AM	SiCl4 post valve closed
3/7/2011	10:51:02 AM	Bubbler valve closed
3/7/2011	10:51:02 AM	Helium valve opened
3/7/2011	10:51:02 AM	Main Vac valve opened
3/7/2011	10:51:02 AM	Bypass valve opened
3/7/2011	10:51:02 AM	Helium MFC set to  100.000000
3/7/2011	10:51:02 AM	H2 MFC set to  0.000000
3/7/2011	10:51:02 AM	BCl3 MFC set to  0.000000
3/7/2011	10:51:02 AM	PHl3 MFC set to  0.000000
3/7/2011	10:51:02 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:51:02 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:51:02 AM	Tube furnace set to 0
3/7/2011	10:52:02 AM	Helium valve closed
3/7/2011	10:52:02 AM	H2 valve closed
3/7/2011	10:52:02 AM	BCl3 valve closed
3/7/2011	10:52:02 AM	PH3 valve closed
3/7/2011	10:52:02 AM	SiCl4 pre valve closed
3/7/2011	10:52:02 AM	SiCl4 post valve closed
3/7/2011	10:52:02 AM	Bubbler valve closed
3/7/2011	10:52:02 AM	Main Vac valve opened
3/7/2011	10:52:02 AM	Bypass valve opened
3/7/2011	10:52:02 AM	Helium MFC set to  0.000000
3/7/2011	10:52:02 AM	H2 MFC set to  0.000000
3/7/2011	10:52:02 AM	BCl3 MFC set to  0.000000
3/7/2011	10:52:02 AM	PHl3 MFC set to  0.000000
3/7/2011	10:52:02 AM	SiCl4 MFC set to  0.000000
3/7/2011	10:52:02 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:52:02 AM	Tube furnace set to 0
3/7/2011	10:52:03 AM	Run finished at 10:52 AM
3/7/2011	10:52:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	10:55:47 AM	Helium MFC set to  100.000000
3/7/2011	10:55:47 AM	Helium valve opened
3/7/2011	10:57:58 AM	Helium valve closed
3/7/2011	10:58:02 AM	Helium MFC set to  0.000000
3/7/2011	11:00:58 AM	Helium valve opened
3/7/2011	11:01:01 AM	Helium MFC set to  50.000000
3/7/2011	11:01:22 AM	Helium MFC set to  0.000000
3/7/2011	11:01:23 AM	Helium valve closed
3/7/2011	11:02:11 AM	Main Vac valve closed
3/7/2011	11:02:12 AM	Bypass valve closed
3/7/2011	11:02:23 AM	Bypass valve opened
3/7/2011	11:02:24 AM	Main Vac valve opened
3/7/2011	11:02:28 AM	Helium MFC set to  10.000000
3/7/2011	11:02:29 AM	Helium valve opened
3/7/2011	11:02:50 AM	Helium MFC set to  0.000000
3/7/2011	11:02:51 AM	Helium valve closed
3/7/2011	11:03:52 AM	Recipe started at 11:03 AM
3/7/2011	11:03:52 AM	Helium valve closed
3/7/2011	11:03:52 AM	BCl3 valve closed
3/7/2011	11:03:52 AM	PH3 valve closed
3/7/2011	11:03:52 AM	SiCl4 pre valve closed
3/7/2011	11:03:52 AM	SiCl4 post valve closed
3/7/2011	11:03:52 AM	Main Vac valve closed
3/7/2011	11:03:52 AM	Bypass valve closed
3/7/2011	11:03:52 AM	Bubbler valve closed
3/7/2011	11:03:52 AM	H2 valve opened
3/7/2011	11:03:52 AM	Helium MFC set to  0.000000
3/7/2011	11:03:52 AM	H2 MFC set to  500.000000
3/7/2011	11:03:52 AM	BCl3 MFC set to  0.000000
3/7/2011	11:03:52 AM	PHl3 MFC set to  0.000000
3/7/2011	11:03:53 AM	SiCl4 MFC set to  0.000000
3/7/2011	11:03:53 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	11:03:53 AM	Tube furnace set to 200
3/7/2011	11:05:12 AM	Helium valve closed
3/7/2011	11:05:12 AM	BCl3 valve closed
3/7/2011	11:05:12 AM	PH3 valve closed
3/7/2011	11:05:12 AM	SiCl4 pre valve closed
3/7/2011	11:05:12 AM	SiCl4 post valve closed
3/7/2011	11:05:12 AM	Main Vac valve closed
3/7/2011	11:05:12 AM	Bypass valve closed
3/7/2011	11:05:12 AM	H2 valve opened
3/7/2011	11:05:12 AM	Bubbler valve opened
3/7/2011	11:05:12 AM	Helium MFC set to  0.000000
3/7/2011	11:05:12 AM	H2 MFC set to  400.000000
3/7/2011	11:05:12 AM	BCl3 MFC set to  0.000000
3/7/2011	11:05:12 AM	PHl3 MFC set to  0.000000
3/7/2011	11:05:12 AM	SiCl4 MFC set to  0.000000
3/7/2011	11:05:12 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	11:05:13 AM	Tube furnace set to 1002
3/7/2011	11:21:53 AM	Helium valve closed
3/7/2011	11:21:53 AM	BCl3 valve closed
3/7/2011	11:21:53 AM	PH3 valve closed
3/7/2011	11:21:53 AM	SiCl4 pre valve closed
3/7/2011	11:21:53 AM	SiCl4 post valve closed
3/7/2011	11:21:53 AM	Main Vac valve closed
3/7/2011	11:21:53 AM	Bypass valve closed
3/7/2011	11:21:53 AM	H2 valve opened
3/7/2011	11:21:53 AM	Bubbler valve opened
3/7/2011	11:21:53 AM	Helium MFC set to  0.000000
3/7/2011	11:21:53 AM	H2 MFC set to  400.000000
3/7/2011	11:21:53 AM	BCl3 MFC set to  0.000000
3/7/2011	11:21:53 AM	PHl3 MFC set to  0.000000
3/7/2011	11:21:53 AM	SiCl4 MFC set to  0.000000
3/7/2011	11:21:53 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	11:21:53 AM	Tube furnace set to 1000
3/7/2011	11:26:13 AM	Helium valve closed
3/7/2011	11:26:13 AM	PH3 valve closed
3/7/2011	11:26:13 AM	Main Vac valve closed
3/7/2011	11:26:13 AM	Bypass valve closed
3/7/2011	11:26:13 AM	H2 valve opened
3/7/2011	11:26:13 AM	BCl3 valve opened
3/7/2011	11:26:13 AM	SiCl4 pre valve opened
3/7/2011	11:26:13 AM	SiCl4 post valve opened
3/7/2011	11:26:13 AM	Bubbler valve opened
3/7/2011	11:26:13 AM	Helium MFC set to  0.000000
3/7/2011	11:26:13 AM	H2 MFC set to  500.000000
3/7/2011	11:26:13 AM	BCl3 MFC set to  2.500000
3/7/2011	11:26:13 AM	PHl3 MFC set to  0.000000
3/7/2011	11:26:13 AM	SiCl4 MFC set to  50.000000
3/7/2011	11:26:13 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	11:26:13 AM	Tube furnace set to 1000
3/7/2011	11:44:13 AM	Helium valve closed
3/7/2011	11:44:13 AM	BCl3 valve closed
3/7/2011	11:44:13 AM	PH3 valve closed
3/7/2011	11:44:13 AM	SiCl4 pre valve closed
3/7/2011	11:44:13 AM	SiCl4 post valve closed
3/7/2011	11:44:13 AM	Main Vac valve closed
3/7/2011	11:44:13 AM	Bypass valve closed
3/7/2011	11:44:13 AM	H2 valve opened
3/7/2011	11:44:13 AM	Bubbler valve opened
3/7/2011	11:44:13 AM	Helium MFC set to  0.000000
3/7/2011	11:44:13 AM	H2 MFC set to  500.000000
3/7/2011	11:44:13 AM	BCl3 MFC set to  0.000000
3/7/2011	11:44:13 AM	PHl3 MFC set to  0.000000
3/7/2011	11:44:13 AM	SiCl4 MFC set to  0.000000
3/7/2011	11:44:13 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	11:44:13 AM	Tube furnace set to 0
3/7/2011	11:47:08 AM	H2 valve closed
3/7/2011	11:47:08 AM	BCl3 valve closed
3/7/2011	11:47:08 AM	PH3 valve closed
3/7/2011	11:47:08 AM	SiCl4 pre valve closed
3/7/2011	11:47:08 AM	SiCl4 post valve closed
3/7/2011	11:47:08 AM	Main Vac valve closed
3/7/2011	11:47:08 AM	Bypass valve closed
3/7/2011	11:47:08 AM	Helium valve opened
3/7/2011	11:47:08 AM	Bubbler valve opened
3/7/2011	11:47:08 AM	Helium MFC set to  400.000000
3/7/2011	11:47:08 AM	H2 MFC set to  0.000000
3/7/2011	11:47:08 AM	BCl3 MFC set to  0.000000
3/7/2011	11:47:08 AM	PHl3 MFC set to  0.000000
3/7/2011	11:47:08 AM	SiCl4 MFC set to  0.000000
3/7/2011	11:47:08 AM	Bypass solenoid MFC set to  0.000000
3/7/2011	11:47:08 AM	Tube furnace set to 0
3/7/2011	12:07:08 PM	Helium valve closed
3/7/2011	12:07:08 PM	H2 valve closed
3/7/2011	12:07:08 PM	BCl3 valve closed
3/7/2011	12:07:08 PM	PH3 valve closed
3/7/2011	12:07:08 PM	SiCl4 pre valve closed
3/7/2011	12:07:08 PM	SiCl4 post valve closed
3/7/2011	12:07:08 PM	Main Vac valve closed
3/7/2011	12:07:08 PM	Bypass valve closed
3/7/2011	12:07:08 PM	Bubbler valve closed
3/7/2011	12:07:08 PM	Helium MFC set to  0.000000
3/7/2011	12:07:08 PM	H2 MFC set to  0.000000
3/7/2011	12:07:08 PM	BCl3 MFC set to  0.000000
3/7/2011	12:07:08 PM	PHl3 MFC set to  0.000000
3/7/2011	12:07:08 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:07:08 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:07:08 PM	Tube furnace set to 0
3/7/2011	12:07:09 PM	Run finished at 12:07 PM
3/7/2011	12:16:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	12:16:48 PM	Recipe started at 12:16 PM
3/7/2011	12:16:48 PM	Helium valve closed
3/7/2011	12:16:48 PM	H2 valve closed
3/7/2011	12:16:48 PM	BCl3 valve closed
3/7/2011	12:16:48 PM	PH3 valve closed
3/7/2011	12:16:48 PM	SiCl4 pre valve closed
3/7/2011	12:16:48 PM	SiCl4 post valve closed
3/7/2011	12:16:48 PM	Main Vac valve closed
3/7/2011	12:16:48 PM	Bubbler valve closed
3/7/2011	12:16:48 PM	Bypass valve opened
3/7/2011	12:16:48 PM	Helium MFC set to  0.000000
3/7/2011	12:16:48 PM	H2 MFC set to  0.000000
3/7/2011	12:16:48 PM	BCl3 MFC set to  0.000000
3/7/2011	12:16:48 PM	PHl3 MFC set to  0.000000
3/7/2011	12:16:48 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:16:48 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:16:48 PM	Tube furnace set to 0
3/7/2011	12:17:19 PM	Helium valve closed
3/7/2011	12:17:19 PM	H2 valve closed
3/7/2011	12:17:19 PM	BCl3 valve closed
3/7/2011	12:17:19 PM	PH3 valve closed
3/7/2011	12:17:19 PM	SiCl4 pre valve closed
3/7/2011	12:17:19 PM	SiCl4 post valve closed
3/7/2011	12:17:19 PM	Bubbler valve closed
3/7/2011	12:17:19 PM	Main Vac valve opened
3/7/2011	12:17:19 PM	Bypass valve opened
3/7/2011	12:17:19 PM	Helium MFC set to  0.000000
3/7/2011	12:17:19 PM	H2 MFC set to  0.000000
3/7/2011	12:17:19 PM	BCl3 MFC set to  0.000000
3/7/2011	12:17:19 PM	PHl3 MFC set to  0.000000
3/7/2011	12:17:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:17:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:17:20 PM	Tube furnace set to 0
3/7/2011	12:18:20 PM	H2 valve closed
3/7/2011	12:18:20 PM	BCl3 valve closed
3/7/2011	12:18:20 PM	PH3 valve closed
3/7/2011	12:18:20 PM	SiCl4 pre valve closed
3/7/2011	12:18:20 PM	SiCl4 post valve closed
3/7/2011	12:18:20 PM	Bubbler valve closed
3/7/2011	12:18:20 PM	Helium valve opened
3/7/2011	12:18:20 PM	Main Vac valve opened
3/7/2011	12:18:20 PM	Bypass valve opened
3/7/2011	12:18:20 PM	Helium MFC set to  100.000000
3/7/2011	12:18:20 PM	H2 MFC set to  0.000000
3/7/2011	12:18:20 PM	BCl3 MFC set to  0.000000
3/7/2011	12:18:20 PM	PHl3 MFC set to  0.000000
3/7/2011	12:18:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:18:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:18:20 PM	Tube furnace set to 0
3/7/2011	12:19:20 PM	Helium valve closed
3/7/2011	12:19:20 PM	H2 valve closed
3/7/2011	12:19:20 PM	BCl3 valve closed
3/7/2011	12:19:20 PM	PH3 valve closed
3/7/2011	12:19:20 PM	SiCl4 pre valve closed
3/7/2011	12:19:20 PM	SiCl4 post valve closed
3/7/2011	12:19:20 PM	Bubbler valve closed
3/7/2011	12:19:20 PM	Main Vac valve opened
3/7/2011	12:19:20 PM	Bypass valve opened
3/7/2011	12:19:20 PM	Helium MFC set to  0.000000
3/7/2011	12:19:20 PM	H2 MFC set to  0.000000
3/7/2011	12:19:20 PM	BCl3 MFC set to  0.000000
3/7/2011	12:19:20 PM	PHl3 MFC set to  0.000000
3/7/2011	12:19:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:19:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:19:20 PM	Tube furnace set to 0
3/7/2011	12:20:20 PM	H2 valve closed
3/7/2011	12:20:20 PM	BCl3 valve closed
3/7/2011	12:20:20 PM	PH3 valve closed
3/7/2011	12:20:20 PM	SiCl4 pre valve closed
3/7/2011	12:20:20 PM	SiCl4 post valve closed
3/7/2011	12:20:20 PM	Bubbler valve closed
3/7/2011	12:20:20 PM	Helium valve opened
3/7/2011	12:20:20 PM	Main Vac valve opened
3/7/2011	12:20:20 PM	Bypass valve opened
3/7/2011	12:20:20 PM	Helium MFC set to  100.000000
3/7/2011	12:20:20 PM	H2 MFC set to  0.000000
3/7/2011	12:20:20 PM	BCl3 MFC set to  0.000000
3/7/2011	12:20:20 PM	PHl3 MFC set to  0.000000
3/7/2011	12:20:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:20:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:20:20 PM	Tube furnace set to 0
3/7/2011	12:21:20 PM	Helium valve closed
3/7/2011	12:21:20 PM	H2 valve closed
3/7/2011	12:21:20 PM	BCl3 valve closed
3/7/2011	12:21:20 PM	PH3 valve closed
3/7/2011	12:21:20 PM	SiCl4 pre valve closed
3/7/2011	12:21:20 PM	SiCl4 post valve closed
3/7/2011	12:21:20 PM	Bubbler valve closed
3/7/2011	12:21:20 PM	Main Vac valve opened
3/7/2011	12:21:20 PM	Bypass valve opened
3/7/2011	12:21:20 PM	Helium MFC set to  0.000000
3/7/2011	12:21:20 PM	H2 MFC set to  0.000000
3/7/2011	12:21:20 PM	BCl3 MFC set to  0.000000
3/7/2011	12:21:20 PM	PHl3 MFC set to  0.000000
3/7/2011	12:21:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:21:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:21:20 PM	Tube furnace set to 0
3/7/2011	12:22:20 PM	H2 valve closed
3/7/2011	12:22:20 PM	BCl3 valve closed
3/7/2011	12:22:20 PM	PH3 valve closed
3/7/2011	12:22:20 PM	SiCl4 pre valve closed
3/7/2011	12:22:20 PM	SiCl4 post valve closed
3/7/2011	12:22:20 PM	Bubbler valve closed
3/7/2011	12:22:20 PM	Helium valve opened
3/7/2011	12:22:20 PM	Main Vac valve opened
3/7/2011	12:22:20 PM	Bypass valve opened
3/7/2011	12:22:20 PM	Helium MFC set to  100.000000
3/7/2011	12:22:20 PM	H2 MFC set to  0.000000
3/7/2011	12:22:20 PM	BCl3 MFC set to  0.000000
3/7/2011	12:22:20 PM	PHl3 MFC set to  0.000000
3/7/2011	12:22:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:22:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:22:20 PM	Tube furnace set to 0
3/7/2011	12:23:20 PM	Helium valve closed
3/7/2011	12:23:21 PM	H2 valve closed
3/7/2011	12:23:21 PM	BCl3 valve closed
3/7/2011	12:23:21 PM	PH3 valve closed
3/7/2011	12:23:21 PM	SiCl4 pre valve closed
3/7/2011	12:23:21 PM	SiCl4 post valve closed
3/7/2011	12:23:21 PM	Bubbler valve closed
3/7/2011	12:23:21 PM	Main Vac valve opened
3/7/2011	12:23:21 PM	Bypass valve opened
3/7/2011	12:23:21 PM	Helium MFC set to  0.000000
3/7/2011	12:23:21 PM	H2 MFC set to  0.000000
3/7/2011	12:23:21 PM	BCl3 MFC set to  0.000000
3/7/2011	12:23:21 PM	PHl3 MFC set to  0.000000
3/7/2011	12:23:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:23:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:23:21 PM	Tube furnace set to 0
3/7/2011	12:24:21 PM	H2 valve closed
3/7/2011	12:24:21 PM	BCl3 valve closed
3/7/2011	12:24:21 PM	PH3 valve closed
3/7/2011	12:24:21 PM	SiCl4 pre valve closed
3/7/2011	12:24:21 PM	SiCl4 post valve closed
3/7/2011	12:24:21 PM	Bubbler valve closed
3/7/2011	12:24:21 PM	Helium valve opened
3/7/2011	12:24:21 PM	Main Vac valve opened
3/7/2011	12:24:21 PM	Bypass valve opened
3/7/2011	12:24:21 PM	Helium MFC set to  100.000000
3/7/2011	12:24:21 PM	H2 MFC set to  0.000000
3/7/2011	12:24:21 PM	BCl3 MFC set to  0.000000
3/7/2011	12:24:21 PM	PHl3 MFC set to  0.000000
3/7/2011	12:24:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:24:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:24:21 PM	Tube furnace set to 0
3/7/2011	12:25:21 PM	Helium valve closed
3/7/2011	12:25:21 PM	H2 valve closed
3/7/2011	12:25:21 PM	BCl3 valve closed
3/7/2011	12:25:21 PM	PH3 valve closed
3/7/2011	12:25:21 PM	SiCl4 pre valve closed
3/7/2011	12:25:21 PM	SiCl4 post valve closed
3/7/2011	12:25:21 PM	Bubbler valve closed
3/7/2011	12:25:21 PM	Main Vac valve opened
3/7/2011	12:25:21 PM	Bypass valve opened
3/7/2011	12:25:21 PM	Helium MFC set to  0.000000
3/7/2011	12:25:21 PM	H2 MFC set to  0.000000
3/7/2011	12:25:21 PM	BCl3 MFC set to  0.000000
3/7/2011	12:25:21 PM	PHl3 MFC set to  0.000000
3/7/2011	12:25:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:25:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:25:21 PM	Tube furnace set to 0
3/7/2011	12:26:21 PM	H2 valve closed
3/7/2011	12:26:21 PM	BCl3 valve closed
3/7/2011	12:26:21 PM	PH3 valve closed
3/7/2011	12:26:21 PM	SiCl4 pre valve closed
3/7/2011	12:26:21 PM	SiCl4 post valve closed
3/7/2011	12:26:21 PM	Bubbler valve closed
3/7/2011	12:26:21 PM	Helium valve opened
3/7/2011	12:26:21 PM	Main Vac valve opened
3/7/2011	12:26:21 PM	Bypass valve opened
3/7/2011	12:26:21 PM	Helium MFC set to  100.000000
3/7/2011	12:26:21 PM	H2 MFC set to  0.000000
3/7/2011	12:26:21 PM	BCl3 MFC set to  0.000000
3/7/2011	12:26:21 PM	PHl3 MFC set to  0.000000
3/7/2011	12:26:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:26:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:26:21 PM	Tube furnace set to 0
3/7/2011	12:27:21 PM	Helium valve closed
3/7/2011	12:27:21 PM	H2 valve closed
3/7/2011	12:27:21 PM	BCl3 valve closed
3/7/2011	12:27:21 PM	PH3 valve closed
3/7/2011	12:27:21 PM	SiCl4 pre valve closed
3/7/2011	12:27:21 PM	SiCl4 post valve closed
3/7/2011	12:27:21 PM	Bubbler valve closed
3/7/2011	12:27:21 PM	Main Vac valve opened
3/7/2011	12:27:21 PM	Bypass valve opened
3/7/2011	12:27:21 PM	Helium MFC set to  0.000000
3/7/2011	12:27:21 PM	H2 MFC set to  0.000000
3/7/2011	12:27:21 PM	BCl3 MFC set to  0.000000
3/7/2011	12:27:21 PM	PHl3 MFC set to  0.000000
3/7/2011	12:27:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:27:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:27:21 PM	Tube furnace set to 0
3/7/2011	12:28:22 PM	H2 valve closed
3/7/2011	12:28:22 PM	BCl3 valve closed
3/7/2011	12:28:22 PM	PH3 valve closed
3/7/2011	12:28:22 PM	SiCl4 pre valve closed
3/7/2011	12:28:22 PM	SiCl4 post valve closed
3/7/2011	12:28:22 PM	Bubbler valve closed
3/7/2011	12:28:22 PM	Helium valve opened
3/7/2011	12:28:22 PM	Main Vac valve opened
3/7/2011	12:28:22 PM	Bypass valve opened
3/7/2011	12:28:22 PM	Helium MFC set to  100.000000
3/7/2011	12:28:22 PM	H2 MFC set to  0.000000
3/7/2011	12:28:22 PM	BCl3 MFC set to  0.000000
3/7/2011	12:28:22 PM	PHl3 MFC set to  0.000000
3/7/2011	12:28:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:28:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:28:22 PM	Tube furnace set to 0
3/7/2011	12:29:22 PM	Helium valve closed
3/7/2011	12:29:22 PM	H2 valve closed
3/7/2011	12:29:22 PM	BCl3 valve closed
3/7/2011	12:29:22 PM	PH3 valve closed
3/7/2011	12:29:22 PM	SiCl4 pre valve closed
3/7/2011	12:29:22 PM	SiCl4 post valve closed
3/7/2011	12:29:22 PM	Bubbler valve closed
3/7/2011	12:29:22 PM	Main Vac valve opened
3/7/2011	12:29:22 PM	Bypass valve opened
3/7/2011	12:29:22 PM	Helium MFC set to  0.000000
3/7/2011	12:29:22 PM	H2 MFC set to  0.000000
3/7/2011	12:29:22 PM	BCl3 MFC set to  0.000000
3/7/2011	12:29:22 PM	PHl3 MFC set to  0.000000
3/7/2011	12:29:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:29:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:29:22 PM	Tube furnace set to 0
3/7/2011	12:30:22 PM	H2 valve closed
3/7/2011	12:30:22 PM	BCl3 valve closed
3/7/2011	12:30:22 PM	PH3 valve closed
3/7/2011	12:30:22 PM	SiCl4 pre valve closed
3/7/2011	12:30:22 PM	SiCl4 post valve closed
3/7/2011	12:30:22 PM	Bubbler valve closed
3/7/2011	12:30:22 PM	Helium valve opened
3/7/2011	12:30:22 PM	Main Vac valve opened
3/7/2011	12:30:22 PM	Bypass valve opened
3/7/2011	12:30:22 PM	Helium MFC set to  100.000000
3/7/2011	12:30:22 PM	H2 MFC set to  0.000000
3/7/2011	12:30:22 PM	BCl3 MFC set to  0.000000
3/7/2011	12:30:22 PM	PHl3 MFC set to  0.000000
3/7/2011	12:30:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:30:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:30:22 PM	Tube furnace set to 0
3/7/2011	12:31:22 PM	Helium valve closed
3/7/2011	12:31:22 PM	H2 valve closed
3/7/2011	12:31:22 PM	BCl3 valve closed
3/7/2011	12:31:22 PM	PH3 valve closed
3/7/2011	12:31:22 PM	SiCl4 pre valve closed
3/7/2011	12:31:22 PM	SiCl4 post valve closed
3/7/2011	12:31:22 PM	Bubbler valve closed
3/7/2011	12:31:22 PM	Main Vac valve opened
3/7/2011	12:31:22 PM	Bypass valve opened
3/7/2011	12:31:22 PM	Helium MFC set to  0.000000
3/7/2011	12:31:22 PM	H2 MFC set to  0.000000
3/7/2011	12:31:22 PM	BCl3 MFC set to  0.000000
3/7/2011	12:31:22 PM	PHl3 MFC set to  0.000000
3/7/2011	12:31:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:31:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:31:22 PM	Tube furnace set to 0
3/7/2011	12:32:22 PM	H2 valve closed
3/7/2011	12:32:22 PM	BCl3 valve closed
3/7/2011	12:32:22 PM	PH3 valve closed
3/7/2011	12:32:22 PM	SiCl4 pre valve closed
3/7/2011	12:32:22 PM	SiCl4 post valve closed
3/7/2011	12:32:22 PM	Bubbler valve closed
3/7/2011	12:32:22 PM	Helium valve opened
3/7/2011	12:32:22 PM	Main Vac valve opened
3/7/2011	12:32:22 PM	Bypass valve opened
3/7/2011	12:32:22 PM	Helium MFC set to  100.000000
3/7/2011	12:32:22 PM	H2 MFC set to  0.000000
3/7/2011	12:32:22 PM	BCl3 MFC set to  0.000000
3/7/2011	12:32:22 PM	PHl3 MFC set to  0.000000
3/7/2011	12:32:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:32:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:32:22 PM	Tube furnace set to 0
3/7/2011	12:33:22 PM	Helium valve closed
3/7/2011	12:33:22 PM	H2 valve closed
3/7/2011	12:33:22 PM	BCl3 valve closed
3/7/2011	12:33:22 PM	PH3 valve closed
3/7/2011	12:33:22 PM	SiCl4 pre valve closed
3/7/2011	12:33:22 PM	SiCl4 post valve closed
3/7/2011	12:33:22 PM	Bubbler valve closed
3/7/2011	12:33:22 PM	Main Vac valve opened
3/7/2011	12:33:22 PM	Bypass valve opened
3/7/2011	12:33:22 PM	Helium MFC set to  0.000000
3/7/2011	12:33:22 PM	H2 MFC set to  0.000000
3/7/2011	12:33:22 PM	BCl3 MFC set to  0.000000
3/7/2011	12:33:22 PM	PHl3 MFC set to  0.000000
3/7/2011	12:33:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:33:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:33:23 PM	Tube furnace set to 0
3/7/2011	12:34:23 PM	H2 valve closed
3/7/2011	12:34:23 PM	BCl3 valve closed
3/7/2011	12:34:23 PM	PH3 valve closed
3/7/2011	12:34:23 PM	SiCl4 pre valve closed
3/7/2011	12:34:23 PM	SiCl4 post valve closed
3/7/2011	12:34:23 PM	Bubbler valve closed
3/7/2011	12:34:23 PM	Helium valve opened
3/7/2011	12:34:23 PM	Main Vac valve opened
3/7/2011	12:34:23 PM	Bypass valve opened
3/7/2011	12:34:23 PM	Helium MFC set to  100.000000
3/7/2011	12:34:23 PM	H2 MFC set to  0.000000
3/7/2011	12:34:23 PM	BCl3 MFC set to  0.000000
3/7/2011	12:34:23 PM	PHl3 MFC set to  0.000000
3/7/2011	12:34:23 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:34:23 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:34:23 PM	Tube furnace set to 0
3/7/2011	12:35:23 PM	Helium valve closed
3/7/2011	12:35:23 PM	H2 valve closed
3/7/2011	12:35:23 PM	BCl3 valve closed
3/7/2011	12:35:23 PM	PH3 valve closed
3/7/2011	12:35:23 PM	SiCl4 pre valve closed
3/7/2011	12:35:23 PM	SiCl4 post valve closed
3/7/2011	12:35:23 PM	Bubbler valve closed
3/7/2011	12:35:23 PM	Main Vac valve opened
3/7/2011	12:35:23 PM	Bypass valve opened
3/7/2011	12:35:23 PM	Helium MFC set to  0.000000
3/7/2011	12:35:23 PM	H2 MFC set to  0.000000
3/7/2011	12:35:23 PM	BCl3 MFC set to  0.000000
3/7/2011	12:35:23 PM	PHl3 MFC set to  0.000000
3/7/2011	12:35:23 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:35:23 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:35:23 PM	Tube furnace set to 0
3/7/2011	12:36:23 PM	H2 valve closed
3/7/2011	12:36:23 PM	BCl3 valve closed
3/7/2011	12:36:23 PM	PH3 valve closed
3/7/2011	12:36:23 PM	SiCl4 pre valve closed
3/7/2011	12:36:23 PM	SiCl4 post valve closed
3/7/2011	12:36:23 PM	Bubbler valve closed
3/7/2011	12:36:23 PM	Helium valve opened
3/7/2011	12:36:23 PM	Main Vac valve opened
3/7/2011	12:36:23 PM	Bypass valve opened
3/7/2011	12:36:23 PM	Helium MFC set to  100.000000
3/7/2011	12:36:23 PM	H2 MFC set to  0.000000
3/7/2011	12:36:23 PM	BCl3 MFC set to  0.000000
3/7/2011	12:36:23 PM	PHl3 MFC set to  0.000000
3/7/2011	12:36:23 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:36:23 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:36:23 PM	Tube furnace set to 0
3/7/2011	12:37:23 PM	Helium valve closed
3/7/2011	12:37:23 PM	H2 valve closed
3/7/2011	12:37:23 PM	BCl3 valve closed
3/7/2011	12:37:23 PM	PH3 valve closed
3/7/2011	12:37:23 PM	SiCl4 pre valve closed
3/7/2011	12:37:23 PM	SiCl4 post valve closed
3/7/2011	12:37:23 PM	Bubbler valve closed
3/7/2011	12:37:23 PM	Main Vac valve opened
3/7/2011	12:37:23 PM	Bypass valve opened
3/7/2011	12:37:23 PM	Helium MFC set to  0.000000
3/7/2011	12:37:23 PM	H2 MFC set to  0.000000
3/7/2011	12:37:23 PM	BCl3 MFC set to  0.000000
3/7/2011	12:37:23 PM	PHl3 MFC set to  0.000000
3/7/2011	12:37:23 PM	SiCl4 MFC set to  0.000000
3/7/2011	12:37:23 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	12:37:23 PM	Tube furnace set to 0
3/7/2011	12:37:24 PM	Run finished at 12:37 PM
3/7/2011	12:37:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	1:06:43 PM	Tube furnace set to 100
3/7/2011	1:06:47 PM	Helium MFC set to  100.000000
3/7/2011	1:06:50 PM	Helium valve opened
3/7/2011	1:08:37 PM	Helium MFC set to  0.000000
3/7/2011	1:08:38 PM	Helium valve closed
3/7/2011	1:13:20 PM	Recipe started at 1:13 PM
3/7/2011	1:13:20 PM	Helium valve closed
3/7/2011	1:13:20 PM	BCl3 valve closed
3/7/2011	1:13:20 PM	PH3 valve closed
3/7/2011	1:13:20 PM	SiCl4 pre valve closed
3/7/2011	1:13:20 PM	SiCl4 post valve closed
3/7/2011	1:13:20 PM	Main Vac valve closed
3/7/2011	1:13:20 PM	Bypass valve closed
3/7/2011	1:13:20 PM	Bubbler valve closed
3/7/2011	1:13:20 PM	H2 valve opened
3/7/2011	1:13:20 PM	Helium MFC set to  0.000000
3/7/2011	1:13:20 PM	H2 MFC set to  500.000000
3/7/2011	1:13:20 PM	BCl3 MFC set to  0.000000
3/7/2011	1:13:20 PM	PHl3 MFC set to  0.000000
3/7/2011	1:13:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	1:13:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	1:13:20 PM	Tube furnace set to 200
3/7/2011	1:14:39 PM	Helium valve closed
3/7/2011	1:14:39 PM	BCl3 valve closed
3/7/2011	1:14:39 PM	PH3 valve closed
3/7/2011	1:14:39 PM	SiCl4 pre valve closed
3/7/2011	1:14:39 PM	SiCl4 post valve closed
3/7/2011	1:14:39 PM	Main Vac valve closed
3/7/2011	1:14:39 PM	Bypass valve closed
3/7/2011	1:14:39 PM	H2 valve opened
3/7/2011	1:14:39 PM	Bubbler valve opened
3/7/2011	1:14:39 PM	Helium MFC set to  0.000000
3/7/2011	1:14:39 PM	H2 MFC set to  400.000000
3/7/2011	1:14:39 PM	BCl3 MFC set to  0.000000
3/7/2011	1:14:39 PM	PHl3 MFC set to  0.000000
3/7/2011	1:14:39 PM	SiCl4 MFC set to  0.000000
3/7/2011	1:14:39 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	1:14:40 PM	Tube furnace set to 1001
3/7/2011	1:31:20 PM	Helium valve closed
3/7/2011	1:31:20 PM	BCl3 valve closed
3/7/2011	1:31:20 PM	PH3 valve closed
3/7/2011	1:31:20 PM	SiCl4 pre valve closed
3/7/2011	1:31:20 PM	SiCl4 post valve closed
3/7/2011	1:31:20 PM	Main Vac valve closed
3/7/2011	1:31:20 PM	Bypass valve closed
3/7/2011	1:31:20 PM	H2 valve opened
3/7/2011	1:31:20 PM	Bubbler valve opened
3/7/2011	1:31:20 PM	Helium MFC set to  0.000000
3/7/2011	1:31:20 PM	H2 MFC set to  400.000000
3/7/2011	1:31:20 PM	BCl3 MFC set to  0.000000
3/7/2011	1:31:20 PM	PHl3 MFC set to  0.000000
3/7/2011	1:31:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	1:31:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	1:31:20 PM	Tube furnace set to 1000
3/7/2011	1:34:40 PM	Helium valve closed
3/7/2011	1:34:40 PM	PH3 valve closed
3/7/2011	1:34:40 PM	Main Vac valve closed
3/7/2011	1:34:40 PM	Bypass valve closed
3/7/2011	1:34:40 PM	H2 valve opened
3/7/2011	1:34:40 PM	BCl3 valve opened
3/7/2011	1:34:40 PM	SiCl4 pre valve opened
3/7/2011	1:34:40 PM	SiCl4 post valve opened
3/7/2011	1:34:40 PM	Bubbler valve opened
3/7/2011	1:34:40 PM	Helium MFC set to  0.000000
3/7/2011	1:34:40 PM	H2 MFC set to  500.000000
3/7/2011	1:34:40 PM	BCl3 MFC set to  2.300000
3/7/2011	1:34:40 PM	PHl3 MFC set to  0.000000
3/7/2011	1:34:40 PM	SiCl4 MFC set to  51.000000
3/7/2011	1:34:40 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	1:34:40 PM	Tube furnace set to 1000
3/7/2011	1:52:40 PM	Helium valve closed
3/7/2011	1:52:40 PM	BCl3 valve closed
3/7/2011	1:52:40 PM	PH3 valve closed
3/7/2011	1:52:40 PM	SiCl4 pre valve closed
3/7/2011	1:52:40 PM	SiCl4 post valve closed
3/7/2011	1:52:40 PM	Main Vac valve closed
3/7/2011	1:52:40 PM	Bypass valve closed
3/7/2011	1:52:40 PM	H2 valve opened
3/7/2011	1:52:40 PM	Bubbler valve opened
3/7/2011	1:52:40 PM	Helium MFC set to  0.000000
3/7/2011	1:52:40 PM	H2 MFC set to  500.000000
3/7/2011	1:52:40 PM	BCl3 MFC set to  0.000000
3/7/2011	1:52:40 PM	PHl3 MFC set to  0.000000
3/7/2011	1:52:40 PM	SiCl4 MFC set to  0.000000
3/7/2011	1:52:40 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	1:52:40 PM	Tube furnace set to 0
3/7/2011	1:55:33 PM	H2 valve closed
3/7/2011	1:55:33 PM	BCl3 valve closed
3/7/2011	1:55:33 PM	PH3 valve closed
3/7/2011	1:55:33 PM	SiCl4 pre valve closed
3/7/2011	1:55:33 PM	SiCl4 post valve closed
3/7/2011	1:55:33 PM	Main Vac valve closed
3/7/2011	1:55:33 PM	Bypass valve closed
3/7/2011	1:55:33 PM	Helium valve opened
3/7/2011	1:55:33 PM	Bubbler valve opened
3/7/2011	1:55:33 PM	Helium MFC set to  400.000000
3/7/2011	1:55:33 PM	H2 MFC set to  0.000000
3/7/2011	1:55:33 PM	BCl3 MFC set to  0.000000
3/7/2011	1:55:33 PM	PHl3 MFC set to  0.000000
3/7/2011	1:55:33 PM	SiCl4 MFC set to  0.000000
3/7/2011	1:55:33 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	1:55:33 PM	Tube furnace set to 0
3/7/2011	2:15:33 PM	Helium valve closed
3/7/2011	2:15:33 PM	H2 valve closed
3/7/2011	2:15:33 PM	BCl3 valve closed
3/7/2011	2:15:33 PM	PH3 valve closed
3/7/2011	2:15:33 PM	SiCl4 pre valve closed
3/7/2011	2:15:33 PM	SiCl4 post valve closed
3/7/2011	2:15:33 PM	Main Vac valve closed
3/7/2011	2:15:33 PM	Bypass valve closed
3/7/2011	2:15:33 PM	Bubbler valve closed
3/7/2011	2:15:33 PM	Helium MFC set to  0.000000
3/7/2011	2:15:33 PM	H2 MFC set to  0.000000
3/7/2011	2:15:33 PM	BCl3 MFC set to  0.000000
3/7/2011	2:15:33 PM	PHl3 MFC set to  0.000000
3/7/2011	2:15:33 PM	SiCl4 MFC set to  0.000000
3/7/2011	2:15:33 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	2:15:33 PM	Tube furnace set to 0
3/7/2011	2:15:34 PM	Run finished at 2:15 PM
3/7/2011	2:57:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	2:57:53 PM	Recipe started at 2:57 PM
3/7/2011	2:57:53 PM	H2 valve closed
3/7/2011	2:57:53 PM	BCl3 valve closed
3/7/2011	2:57:53 PM	PH3 valve closed
3/7/2011	2:57:53 PM	SiCl4 pre valve closed
3/7/2011	2:57:53 PM	SiCl4 post valve closed
3/7/2011	2:57:53 PM	Main Vac valve closed
3/7/2011	2:57:53 PM	Bypass valve closed
3/7/2011	2:57:53 PM	Bubbler valve closed
3/7/2011	2:57:53 PM	Helium valve opened
3/7/2011	2:57:53 PM	Helium MFC set to  500.000000
3/7/2011	2:57:53 PM	H2 MFC set to  0.000000
3/7/2011	2:57:53 PM	BCl3 MFC set to  0.000000
3/7/2011	2:57:53 PM	PHl3 MFC set to  0.000000
3/7/2011	2:57:53 PM	SiCl4 MFC set to  0.000000
3/7/2011	2:57:53 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	2:57:53 PM	Tube furnace set to 0
3/7/2011	2:57:56 PM	Helium valve closed
3/7/2011	2:57:56 PM	H2 valve closed
3/7/2011	2:57:56 PM	BCl3 valve closed
3/7/2011	2:57:56 PM	PH3 valve closed
3/7/2011	2:57:56 PM	SiCl4 pre valve closed
3/7/2011	2:57:56 PM	SiCl4 post valve closed
3/7/2011	2:57:56 PM	Main Vac valve closed
3/7/2011	2:57:56 PM	Bypass valve closed
3/7/2011	2:57:56 PM	Bubbler valve closed
3/7/2011	2:57:56 PM	Helium MFC set to  0.000000
3/7/2011	2:57:56 PM	H2 MFC set to  0.000000
3/7/2011	2:57:56 PM	BCl3 MFC set to  0.000000
3/7/2011	2:57:56 PM	PHl3 MFC set to  0.000000
3/7/2011	2:57:56 PM	SiCl4 MFC set to  0.000000
3/7/2011	2:57:56 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	2:57:56 PM	Tube furnace set to 0
3/7/2011	2:57:57 PM	Run finished at 2:57 PM
3/7/2011	2:57:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	3:03:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	3:03:25 PM	Recipe started at 3:03 PM
3/7/2011	3:03:25 PM	Helium valve closed
3/7/2011	3:03:25 PM	H2 valve closed
3/7/2011	3:03:25 PM	BCl3 valve closed
3/7/2011	3:03:25 PM	PH3 valve closed
3/7/2011	3:03:25 PM	SiCl4 pre valve closed
3/7/2011	3:03:25 PM	SiCl4 post valve closed
3/7/2011	3:03:25 PM	Main Vac valve closed
3/7/2011	3:03:25 PM	Bubbler valve closed
3/7/2011	3:03:25 PM	Bypass valve opened
3/7/2011	3:03:25 PM	Helium MFC set to  0.000000
3/7/2011	3:03:25 PM	H2 MFC set to  0.000000
3/7/2011	3:03:25 PM	BCl3 MFC set to  0.000000
3/7/2011	3:03:25 PM	PHl3 MFC set to  0.000000
3/7/2011	3:03:25 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:03:25 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:03:25 PM	Tube furnace set to 0
3/7/2011	3:03:57 PM	Helium valve closed
3/7/2011	3:03:57 PM	H2 valve closed
3/7/2011	3:03:57 PM	BCl3 valve closed
3/7/2011	3:03:57 PM	PH3 valve closed
3/7/2011	3:03:57 PM	SiCl4 pre valve closed
3/7/2011	3:03:57 PM	SiCl4 post valve closed
3/7/2011	3:03:57 PM	Bubbler valve closed
3/7/2011	3:03:57 PM	Main Vac valve opened
3/7/2011	3:03:57 PM	Bypass valve opened
3/7/2011	3:03:57 PM	Helium MFC set to  0.000000
3/7/2011	3:03:57 PM	H2 MFC set to  0.000000
3/7/2011	3:03:57 PM	BCl3 MFC set to  0.000000
3/7/2011	3:03:57 PM	PHl3 MFC set to  0.000000
3/7/2011	3:03:57 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:03:57 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:03:57 PM	Tube furnace set to 0
3/7/2011	3:04:57 PM	H2 valve closed
3/7/2011	3:04:57 PM	BCl3 valve closed
3/7/2011	3:04:57 PM	PH3 valve closed
3/7/2011	3:04:57 PM	SiCl4 pre valve closed
3/7/2011	3:04:57 PM	SiCl4 post valve closed
3/7/2011	3:04:57 PM	Bubbler valve closed
3/7/2011	3:04:57 PM	Helium valve opened
3/7/2011	3:04:57 PM	Main Vac valve opened
3/7/2011	3:04:57 PM	Bypass valve opened
3/7/2011	3:04:57 PM	Helium MFC set to  100.000000
3/7/2011	3:04:57 PM	H2 MFC set to  0.000000
3/7/2011	3:04:57 PM	BCl3 MFC set to  0.000000
3/7/2011	3:04:57 PM	PHl3 MFC set to  0.000000
3/7/2011	3:04:57 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:04:57 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:04:57 PM	Tube furnace set to 0
3/7/2011	3:05:57 PM	Helium valve closed
3/7/2011	3:05:57 PM	H2 valve closed
3/7/2011	3:05:57 PM	BCl3 valve closed
3/7/2011	3:05:57 PM	PH3 valve closed
3/7/2011	3:05:57 PM	SiCl4 pre valve closed
3/7/2011	3:05:57 PM	SiCl4 post valve closed
3/7/2011	3:05:57 PM	Bubbler valve closed
3/7/2011	3:05:57 PM	Main Vac valve opened
3/7/2011	3:05:57 PM	Bypass valve opened
3/7/2011	3:05:57 PM	Helium MFC set to  0.000000
3/7/2011	3:05:57 PM	H2 MFC set to  0.000000
3/7/2011	3:05:57 PM	BCl3 MFC set to  0.000000
3/7/2011	3:05:57 PM	PHl3 MFC set to  0.000000
3/7/2011	3:05:57 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:05:57 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:05:57 PM	Tube furnace set to 0
3/7/2011	3:06:57 PM	H2 valve closed
3/7/2011	3:06:57 PM	BCl3 valve closed
3/7/2011	3:06:57 PM	PH3 valve closed
3/7/2011	3:06:57 PM	SiCl4 pre valve closed
3/7/2011	3:06:57 PM	SiCl4 post valve closed
3/7/2011	3:06:57 PM	Bubbler valve closed
3/7/2011	3:06:57 PM	Helium valve opened
3/7/2011	3:06:57 PM	Main Vac valve opened
3/7/2011	3:06:57 PM	Bypass valve opened
3/7/2011	3:06:57 PM	Helium MFC set to  100.000000
3/7/2011	3:06:57 PM	H2 MFC set to  0.000000
3/7/2011	3:06:57 PM	BCl3 MFC set to  0.000000
3/7/2011	3:06:57 PM	PHl3 MFC set to  0.000000
3/7/2011	3:06:57 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:06:57 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:06:57 PM	Tube furnace set to 0
3/7/2011	3:07:57 PM	Helium valve closed
3/7/2011	3:07:57 PM	H2 valve closed
3/7/2011	3:07:57 PM	BCl3 valve closed
3/7/2011	3:07:57 PM	PH3 valve closed
3/7/2011	3:07:57 PM	SiCl4 pre valve closed
3/7/2011	3:07:57 PM	SiCl4 post valve closed
3/7/2011	3:07:57 PM	Bubbler valve closed
3/7/2011	3:07:57 PM	Main Vac valve opened
3/7/2011	3:07:57 PM	Bypass valve opened
3/7/2011	3:07:57 PM	Helium MFC set to  0.000000
3/7/2011	3:07:57 PM	H2 MFC set to  0.000000
3/7/2011	3:07:57 PM	BCl3 MFC set to  0.000000
3/7/2011	3:07:57 PM	PHl3 MFC set to  0.000000
3/7/2011	3:07:57 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:07:57 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:07:58 PM	Tube furnace set to 0
3/7/2011	3:08:58 PM	H2 valve closed
3/7/2011	3:08:58 PM	BCl3 valve closed
3/7/2011	3:08:58 PM	PH3 valve closed
3/7/2011	3:08:58 PM	SiCl4 pre valve closed
3/7/2011	3:08:58 PM	SiCl4 post valve closed
3/7/2011	3:08:58 PM	Bubbler valve closed
3/7/2011	3:08:58 PM	Helium valve opened
3/7/2011	3:08:58 PM	Main Vac valve opened
3/7/2011	3:08:58 PM	Bypass valve opened
3/7/2011	3:08:58 PM	Helium MFC set to  100.000000
3/7/2011	3:08:58 PM	H2 MFC set to  0.000000
3/7/2011	3:08:58 PM	BCl3 MFC set to  0.000000
3/7/2011	3:08:58 PM	PHl3 MFC set to  0.000000
3/7/2011	3:08:58 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:08:58 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:08:58 PM	Tube furnace set to 0
3/7/2011	3:09:58 PM	Helium valve closed
3/7/2011	3:09:58 PM	H2 valve closed
3/7/2011	3:09:58 PM	BCl3 valve closed
3/7/2011	3:09:58 PM	PH3 valve closed
3/7/2011	3:09:58 PM	SiCl4 pre valve closed
3/7/2011	3:09:58 PM	SiCl4 post valve closed
3/7/2011	3:09:58 PM	Bubbler valve closed
3/7/2011	3:09:58 PM	Main Vac valve opened
3/7/2011	3:09:58 PM	Bypass valve opened
3/7/2011	3:09:58 PM	Helium MFC set to  0.000000
3/7/2011	3:09:58 PM	H2 MFC set to  0.000000
3/7/2011	3:09:58 PM	BCl3 MFC set to  0.000000
3/7/2011	3:09:58 PM	PHl3 MFC set to  0.000000
3/7/2011	3:09:58 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:09:58 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:09:58 PM	Tube furnace set to 0
3/7/2011	3:10:58 PM	H2 valve closed
3/7/2011	3:10:58 PM	BCl3 valve closed
3/7/2011	3:10:58 PM	PH3 valve closed
3/7/2011	3:10:58 PM	SiCl4 pre valve closed
3/7/2011	3:10:58 PM	SiCl4 post valve closed
3/7/2011	3:10:58 PM	Bubbler valve closed
3/7/2011	3:10:58 PM	Helium valve opened
3/7/2011	3:10:58 PM	Main Vac valve opened
3/7/2011	3:10:58 PM	Bypass valve opened
3/7/2011	3:10:58 PM	Helium MFC set to  100.000000
3/7/2011	3:10:58 PM	H2 MFC set to  0.000000
3/7/2011	3:10:58 PM	BCl3 MFC set to  0.000000
3/7/2011	3:10:58 PM	PHl3 MFC set to  0.000000
3/7/2011	3:10:58 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:10:58 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:10:58 PM	Tube furnace set to 0
3/7/2011	3:11:58 PM	Helium valve closed
3/7/2011	3:11:58 PM	H2 valve closed
3/7/2011	3:11:58 PM	BCl3 valve closed
3/7/2011	3:11:58 PM	PH3 valve closed
3/7/2011	3:11:58 PM	SiCl4 pre valve closed
3/7/2011	3:11:58 PM	SiCl4 post valve closed
3/7/2011	3:11:58 PM	Bubbler valve closed
3/7/2011	3:11:58 PM	Main Vac valve opened
3/7/2011	3:11:58 PM	Bypass valve opened
3/7/2011	3:11:58 PM	Helium MFC set to  0.000000
3/7/2011	3:11:58 PM	H2 MFC set to  0.000000
3/7/2011	3:11:58 PM	BCl3 MFC set to  0.000000
3/7/2011	3:11:58 PM	PHl3 MFC set to  0.000000
3/7/2011	3:11:58 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:11:58 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:11:58 PM	Tube furnace set to 0
3/7/2011	3:12:58 PM	H2 valve closed
3/7/2011	3:12:58 PM	BCl3 valve closed
3/7/2011	3:12:58 PM	PH3 valve closed
3/7/2011	3:12:58 PM	SiCl4 pre valve closed
3/7/2011	3:12:58 PM	SiCl4 post valve closed
3/7/2011	3:12:58 PM	Bubbler valve closed
3/7/2011	3:12:58 PM	Helium valve opened
3/7/2011	3:12:58 PM	Main Vac valve opened
3/7/2011	3:12:58 PM	Bypass valve opened
3/7/2011	3:12:58 PM	Helium MFC set to  100.000000
3/7/2011	3:12:58 PM	H2 MFC set to  0.000000
3/7/2011	3:12:58 PM	BCl3 MFC set to  0.000000
3/7/2011	3:12:58 PM	PHl3 MFC set to  0.000000
3/7/2011	3:12:58 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:12:58 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:12:59 PM	Tube furnace set to 0
3/7/2011	3:13:59 PM	Helium valve closed
3/7/2011	3:13:59 PM	H2 valve closed
3/7/2011	3:13:59 PM	BCl3 valve closed
3/7/2011	3:13:59 PM	PH3 valve closed
3/7/2011	3:13:59 PM	SiCl4 pre valve closed
3/7/2011	3:13:59 PM	SiCl4 post valve closed
3/7/2011	3:13:59 PM	Bubbler valve closed
3/7/2011	3:13:59 PM	Main Vac valve opened
3/7/2011	3:13:59 PM	Bypass valve opened
3/7/2011	3:13:59 PM	Helium MFC set to  0.000000
3/7/2011	3:13:59 PM	H2 MFC set to  0.000000
3/7/2011	3:13:59 PM	BCl3 MFC set to  0.000000
3/7/2011	3:13:59 PM	PHl3 MFC set to  0.000000
3/7/2011	3:13:59 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:13:59 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:13:59 PM	Tube furnace set to 0
3/7/2011	3:14:59 PM	H2 valve closed
3/7/2011	3:14:59 PM	BCl3 valve closed
3/7/2011	3:14:59 PM	PH3 valve closed
3/7/2011	3:14:59 PM	SiCl4 pre valve closed
3/7/2011	3:14:59 PM	SiCl4 post valve closed
3/7/2011	3:14:59 PM	Bubbler valve closed
3/7/2011	3:14:59 PM	Helium valve opened
3/7/2011	3:14:59 PM	Main Vac valve opened
3/7/2011	3:14:59 PM	Bypass valve opened
3/7/2011	3:14:59 PM	Helium MFC set to  100.000000
3/7/2011	3:14:59 PM	H2 MFC set to  0.000000
3/7/2011	3:14:59 PM	BCl3 MFC set to  0.000000
3/7/2011	3:14:59 PM	PHl3 MFC set to  0.000000
3/7/2011	3:14:59 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:14:59 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:14:59 PM	Tube furnace set to 0
3/7/2011	3:15:59 PM	Helium valve closed
3/7/2011	3:15:59 PM	H2 valve closed
3/7/2011	3:15:59 PM	BCl3 valve closed
3/7/2011	3:15:59 PM	PH3 valve closed
3/7/2011	3:15:59 PM	SiCl4 pre valve closed
3/7/2011	3:15:59 PM	SiCl4 post valve closed
3/7/2011	3:15:59 PM	Bubbler valve closed
3/7/2011	3:15:59 PM	Main Vac valve opened
3/7/2011	3:15:59 PM	Bypass valve opened
3/7/2011	3:15:59 PM	Helium MFC set to  0.000000
3/7/2011	3:15:59 PM	H2 MFC set to  0.000000
3/7/2011	3:15:59 PM	BCl3 MFC set to  0.000000
3/7/2011	3:15:59 PM	PHl3 MFC set to  0.000000
3/7/2011	3:15:59 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:15:59 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:15:59 PM	Tube furnace set to 0
3/7/2011	3:16:59 PM	H2 valve closed
3/7/2011	3:16:59 PM	BCl3 valve closed
3/7/2011	3:16:59 PM	PH3 valve closed
3/7/2011	3:16:59 PM	SiCl4 pre valve closed
3/7/2011	3:16:59 PM	SiCl4 post valve closed
3/7/2011	3:16:59 PM	Bubbler valve closed
3/7/2011	3:16:59 PM	Helium valve opened
3/7/2011	3:16:59 PM	Main Vac valve opened
3/7/2011	3:16:59 PM	Bypass valve opened
3/7/2011	3:16:59 PM	Helium MFC set to  100.000000
3/7/2011	3:16:59 PM	H2 MFC set to  0.000000
3/7/2011	3:16:59 PM	BCl3 MFC set to  0.000000
3/7/2011	3:16:59 PM	PHl3 MFC set to  0.000000
3/7/2011	3:16:59 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:16:59 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:16:59 PM	Tube furnace set to 0
3/7/2011	3:17:59 PM	Helium valve closed
3/7/2011	3:17:59 PM	H2 valve closed
3/7/2011	3:17:59 PM	BCl3 valve closed
3/7/2011	3:17:59 PM	PH3 valve closed
3/7/2011	3:17:59 PM	SiCl4 pre valve closed
3/7/2011	3:17:59 PM	SiCl4 post valve closed
3/7/2011	3:17:59 PM	Bubbler valve closed
3/7/2011	3:17:59 PM	Main Vac valve opened
3/7/2011	3:17:59 PM	Bypass valve opened
3/7/2011	3:17:59 PM	Helium MFC set to  0.000000
3/7/2011	3:17:59 PM	H2 MFC set to  0.000000
3/7/2011	3:17:59 PM	BCl3 MFC set to  0.000000
3/7/2011	3:17:59 PM	PHl3 MFC set to  0.000000
3/7/2011	3:17:59 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:17:59 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:18:00 PM	Tube furnace set to 0
3/7/2011	3:19:00 PM	H2 valve closed
3/7/2011	3:19:00 PM	BCl3 valve closed
3/7/2011	3:19:00 PM	PH3 valve closed
3/7/2011	3:19:00 PM	SiCl4 pre valve closed
3/7/2011	3:19:00 PM	SiCl4 post valve closed
3/7/2011	3:19:00 PM	Bubbler valve closed
3/7/2011	3:19:00 PM	Helium valve opened
3/7/2011	3:19:00 PM	Main Vac valve opened
3/7/2011	3:19:00 PM	Bypass valve opened
3/7/2011	3:19:00 PM	Helium MFC set to  100.000000
3/7/2011	3:19:00 PM	H2 MFC set to  0.000000
3/7/2011	3:19:00 PM	BCl3 MFC set to  0.000000
3/7/2011	3:19:00 PM	PHl3 MFC set to  0.000000
3/7/2011	3:19:00 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:19:00 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:19:00 PM	Tube furnace set to 0
3/7/2011	3:20:00 PM	Helium valve closed
3/7/2011	3:20:00 PM	H2 valve closed
3/7/2011	3:20:00 PM	BCl3 valve closed
3/7/2011	3:20:00 PM	PH3 valve closed
3/7/2011	3:20:00 PM	SiCl4 pre valve closed
3/7/2011	3:20:00 PM	SiCl4 post valve closed
3/7/2011	3:20:00 PM	Bubbler valve closed
3/7/2011	3:20:00 PM	Main Vac valve opened
3/7/2011	3:20:00 PM	Bypass valve opened
3/7/2011	3:20:00 PM	Helium MFC set to  0.000000
3/7/2011	3:20:00 PM	H2 MFC set to  0.000000
3/7/2011	3:20:00 PM	BCl3 MFC set to  0.000000
3/7/2011	3:20:00 PM	PHl3 MFC set to  0.000000
3/7/2011	3:20:00 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:20:00 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:20:00 PM	Tube furnace set to 0
3/7/2011	3:21:00 PM	H2 valve closed
3/7/2011	3:21:00 PM	BCl3 valve closed
3/7/2011	3:21:00 PM	PH3 valve closed
3/7/2011	3:21:00 PM	SiCl4 pre valve closed
3/7/2011	3:21:00 PM	SiCl4 post valve closed
3/7/2011	3:21:00 PM	Bubbler valve closed
3/7/2011	3:21:00 PM	Helium valve opened
3/7/2011	3:21:00 PM	Main Vac valve opened
3/7/2011	3:21:00 PM	Bypass valve opened
3/7/2011	3:21:00 PM	Helium MFC set to  100.000000
3/7/2011	3:21:00 PM	H2 MFC set to  0.000000
3/7/2011	3:21:00 PM	BCl3 MFC set to  0.000000
3/7/2011	3:21:00 PM	PHl3 MFC set to  0.000000
3/7/2011	3:21:00 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:21:00 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:21:00 PM	Tube furnace set to 0
3/7/2011	3:22:00 PM	Helium valve closed
3/7/2011	3:22:00 PM	H2 valve closed
3/7/2011	3:22:00 PM	BCl3 valve closed
3/7/2011	3:22:00 PM	PH3 valve closed
3/7/2011	3:22:00 PM	SiCl4 pre valve closed
3/7/2011	3:22:00 PM	SiCl4 post valve closed
3/7/2011	3:22:00 PM	Bubbler valve closed
3/7/2011	3:22:00 PM	Main Vac valve opened
3/7/2011	3:22:00 PM	Bypass valve opened
3/7/2011	3:22:00 PM	Helium MFC set to  0.000000
3/7/2011	3:22:00 PM	H2 MFC set to  0.000000
3/7/2011	3:22:00 PM	BCl3 MFC set to  0.000000
3/7/2011	3:22:00 PM	PHl3 MFC set to  0.000000
3/7/2011	3:22:00 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:22:00 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:22:00 PM	Tube furnace set to 0
3/7/2011	3:23:00 PM	H2 valve closed
3/7/2011	3:23:00 PM	BCl3 valve closed
3/7/2011	3:23:00 PM	PH3 valve closed
3/7/2011	3:23:00 PM	SiCl4 pre valve closed
3/7/2011	3:23:00 PM	SiCl4 post valve closed
3/7/2011	3:23:00 PM	Bubbler valve closed
3/7/2011	3:23:00 PM	Helium valve opened
3/7/2011	3:23:00 PM	Main Vac valve opened
3/7/2011	3:23:00 PM	Bypass valve opened
3/7/2011	3:23:00 PM	Helium MFC set to  100.000000
3/7/2011	3:23:00 PM	H2 MFC set to  0.000000
3/7/2011	3:23:00 PM	BCl3 MFC set to  0.000000
3/7/2011	3:23:00 PM	PHl3 MFC set to  0.000000
3/7/2011	3:23:00 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:23:00 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:23:01 PM	Tube furnace set to 0
3/7/2011	3:24:01 PM	Helium valve closed
3/7/2011	3:24:01 PM	H2 valve closed
3/7/2011	3:24:01 PM	BCl3 valve closed
3/7/2011	3:24:01 PM	PH3 valve closed
3/7/2011	3:24:01 PM	SiCl4 pre valve closed
3/7/2011	3:24:01 PM	SiCl4 post valve closed
3/7/2011	3:24:01 PM	Bubbler valve closed
3/7/2011	3:24:01 PM	Main Vac valve opened
3/7/2011	3:24:01 PM	Bypass valve opened
3/7/2011	3:24:01 PM	Helium MFC set to  0.000000
3/7/2011	3:24:01 PM	H2 MFC set to  0.000000
3/7/2011	3:24:01 PM	BCl3 MFC set to  0.000000
3/7/2011	3:24:01 PM	PHl3 MFC set to  0.000000
3/7/2011	3:24:01 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:24:01 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:24:01 PM	Tube furnace set to 0
3/7/2011	3:24:02 PM	Run finished at 3:24 PM
3/7/2011	3:24:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	3:34:35 PM	Helium valve opened
3/7/2011	3:34:39 PM	Helium MFC set to  100.000000
3/7/2011	3:37:12 PM	Helium MFC set to  0.000000
3/7/2011	3:37:13 PM	Helium valve closed
3/7/2011	3:37:58 PM	Main Vac valve closed
3/7/2011	3:38:00 PM	Bypass valve closed
3/7/2011	3:38:21 PM	Bypass valve opened
3/7/2011	3:38:22 PM	Main Vac valve opened
3/7/2011	3:38:26 PM	Helium MFC set to  20.000000
3/7/2011	3:38:29 PM	Helium valve opened
3/7/2011	3:38:40 PM	Helium MFC set to  0.000000
3/7/2011	3:38:42 PM	Helium valve closed
3/7/2011	3:41:34 PM	Recipe started at 3:41 PM
3/7/2011	3:41:34 PM	Helium valve closed
3/7/2011	3:41:34 PM	BCl3 valve closed
3/7/2011	3:41:34 PM	PH3 valve closed
3/7/2011	3:41:34 PM	SiCl4 pre valve closed
3/7/2011	3:41:34 PM	SiCl4 post valve closed
3/7/2011	3:41:34 PM	Main Vac valve closed
3/7/2011	3:41:34 PM	Bypass valve closed
3/7/2011	3:41:34 PM	Bubbler valve closed
3/7/2011	3:41:34 PM	H2 valve opened
3/7/2011	3:41:34 PM	Helium MFC set to  0.000000
3/7/2011	3:41:34 PM	H2 MFC set to  500.000000
3/7/2011	3:41:34 PM	BCl3 MFC set to  0.000000
3/7/2011	3:41:34 PM	PHl3 MFC set to  0.000000
3/7/2011	3:41:34 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:41:34 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:41:34 PM	Tube furnace set to 200
3/7/2011	3:42:55 PM	Helium valve closed
3/7/2011	3:42:55 PM	BCl3 valve closed
3/7/2011	3:42:55 PM	PH3 valve closed
3/7/2011	3:42:55 PM	SiCl4 pre valve closed
3/7/2011	3:42:55 PM	SiCl4 post valve closed
3/7/2011	3:42:55 PM	Main Vac valve closed
3/7/2011	3:42:55 PM	Bypass valve closed
3/7/2011	3:42:55 PM	H2 valve opened
3/7/2011	3:42:55 PM	Bubbler valve opened
3/7/2011	3:42:55 PM	Helium MFC set to  0.000000
3/7/2011	3:42:55 PM	H2 MFC set to  400.000000
3/7/2011	3:42:55 PM	BCl3 MFC set to  0.000000
3/7/2011	3:42:55 PM	PHl3 MFC set to  0.000000
3/7/2011	3:42:55 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:42:55 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:42:55 PM	Tube furnace set to 1001
3/7/2011	3:59:35 PM	Helium valve closed
3/7/2011	3:59:35 PM	BCl3 valve closed
3/7/2011	3:59:35 PM	PH3 valve closed
3/7/2011	3:59:35 PM	SiCl4 pre valve closed
3/7/2011	3:59:35 PM	SiCl4 post valve closed
3/7/2011	3:59:35 PM	Main Vac valve closed
3/7/2011	3:59:35 PM	Bypass valve closed
3/7/2011	3:59:35 PM	H2 valve opened
3/7/2011	3:59:35 PM	Bubbler valve opened
3/7/2011	3:59:35 PM	Helium MFC set to  0.000000
3/7/2011	3:59:35 PM	H2 MFC set to  400.000000
3/7/2011	3:59:35 PM	BCl3 MFC set to  0.000000
3/7/2011	3:59:35 PM	PHl3 MFC set to  0.000000
3/7/2011	3:59:35 PM	SiCl4 MFC set to  0.000000
3/7/2011	3:59:35 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	3:59:35 PM	Tube furnace set to 1000
3/7/2011	4:03:55 PM	Helium valve closed
3/7/2011	4:03:55 PM	PH3 valve closed
3/7/2011	4:03:55 PM	Main Vac valve closed
3/7/2011	4:03:55 PM	Bypass valve closed
3/7/2011	4:03:55 PM	H2 valve opened
3/7/2011	4:03:55 PM	BCl3 valve opened
3/7/2011	4:03:55 PM	SiCl4 pre valve opened
3/7/2011	4:03:55 PM	SiCl4 post valve opened
3/7/2011	4:03:55 PM	Bubbler valve opened
3/7/2011	4:03:55 PM	Helium MFC set to  0.000000
3/7/2011	4:03:55 PM	H2 MFC set to  500.000000
3/7/2011	4:03:55 PM	BCl3 MFC set to  2.300000
3/7/2011	4:03:55 PM	PHl3 MFC set to  0.000000
3/7/2011	4:03:55 PM	SiCl4 MFC set to  51.000000
3/7/2011	4:03:55 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	4:03:55 PM	Tube furnace set to 1000
3/7/2011	4:21:55 PM	Helium valve closed
3/7/2011	4:21:55 PM	BCl3 valve closed
3/7/2011	4:21:55 PM	PH3 valve closed
3/7/2011	4:21:55 PM	SiCl4 pre valve closed
3/7/2011	4:21:55 PM	SiCl4 post valve closed
3/7/2011	4:21:55 PM	Main Vac valve closed
3/7/2011	4:21:55 PM	Bypass valve closed
3/7/2011	4:21:55 PM	H2 valve opened
3/7/2011	4:21:56 PM	Bubbler valve opened
3/7/2011	4:21:56 PM	Helium MFC set to  0.000000
3/7/2011	4:21:56 PM	H2 MFC set to  500.000000
3/7/2011	4:21:56 PM	BCl3 MFC set to  0.000000
3/7/2011	4:21:56 PM	PHl3 MFC set to  0.000000
3/7/2011	4:21:56 PM	SiCl4 MFC set to  0.000000
3/7/2011	4:21:56 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	4:21:56 PM	Tube furnace set to 0
3/7/2011	4:24:50 PM	H2 valve closed
3/7/2011	4:24:50 PM	BCl3 valve closed
3/7/2011	4:24:50 PM	PH3 valve closed
3/7/2011	4:24:50 PM	SiCl4 pre valve closed
3/7/2011	4:24:50 PM	SiCl4 post valve closed
3/7/2011	4:24:50 PM	Main Vac valve closed
3/7/2011	4:24:50 PM	Bypass valve closed
3/7/2011	4:24:50 PM	Helium valve opened
3/7/2011	4:24:50 PM	Bubbler valve opened
3/7/2011	4:24:50 PM	Helium MFC set to  400.000000
3/7/2011	4:24:50 PM	H2 MFC set to  0.000000
3/7/2011	4:24:50 PM	BCl3 MFC set to  0.000000
3/7/2011	4:24:50 PM	PHl3 MFC set to  0.000000
3/7/2011	4:24:50 PM	SiCl4 MFC set to  0.000000
3/7/2011	4:24:50 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	4:24:50 PM	Tube furnace set to 0
3/7/2011	4:44:50 PM	Helium valve closed
3/7/2011	4:44:50 PM	H2 valve closed
3/7/2011	4:44:50 PM	BCl3 valve closed
3/7/2011	4:44:50 PM	PH3 valve closed
3/7/2011	4:44:50 PM	SiCl4 pre valve closed
3/7/2011	4:44:50 PM	SiCl4 post valve closed
3/7/2011	4:44:50 PM	Main Vac valve closed
3/7/2011	4:44:50 PM	Bypass valve closed
3/7/2011	4:44:50 PM	Bubbler valve closed
3/7/2011	4:44:50 PM	Helium MFC set to  0.000000
3/7/2011	4:44:50 PM	H2 MFC set to  0.000000
3/7/2011	4:44:50 PM	BCl3 MFC set to  0.000000
3/7/2011	4:44:50 PM	PHl3 MFC set to  0.000000
3/7/2011	4:44:50 PM	SiCl4 MFC set to  0.000000
3/7/2011	4:44:50 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	4:44:50 PM	Tube furnace set to 0
3/7/2011	4:44:50 PM	Run finished at 4:44 PM
3/7/2011	4:56:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	4:56:40 PM	Recipe started at 4:56 PM
3/7/2011	4:56:40 PM	H2 valve closed
3/7/2011	4:56:40 PM	BCl3 valve closed
3/7/2011	4:56:40 PM	PH3 valve closed
3/7/2011	4:56:40 PM	SiCl4 pre valve closed
3/7/2011	4:56:40 PM	SiCl4 post valve closed
3/7/2011	4:56:40 PM	Main Vac valve closed
3/7/2011	4:56:40 PM	Bypass valve closed
3/7/2011	4:56:40 PM	Bubbler valve closed
3/7/2011	4:56:40 PM	Helium valve opened
3/7/2011	4:56:40 PM	Helium MFC set to  500.000000
3/7/2011	4:56:40 PM	H2 MFC set to  0.000000
3/7/2011	4:56:40 PM	BCl3 MFC set to  0.000000
3/7/2011	4:56:40 PM	PHl3 MFC set to  0.000000
3/7/2011	4:56:40 PM	SiCl4 MFC set to  0.000000
3/7/2011	4:56:40 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	4:56:40 PM	Tube furnace set to 0
3/7/2011	4:56:42 PM	Helium valve closed
3/7/2011	4:56:42 PM	H2 valve closed
3/7/2011	4:56:42 PM	BCl3 valve closed
3/7/2011	4:56:42 PM	PH3 valve closed
3/7/2011	4:56:42 PM	SiCl4 pre valve closed
3/7/2011	4:56:42 PM	SiCl4 post valve closed
3/7/2011	4:56:42 PM	Main Vac valve closed
3/7/2011	4:56:42 PM	Bypass valve closed
3/7/2011	4:56:42 PM	Bubbler valve closed
3/7/2011	4:56:42 PM	Helium MFC set to  0.000000
3/7/2011	4:56:42 PM	H2 MFC set to  0.000000
3/7/2011	4:56:42 PM	BCl3 MFC set to  0.000000
3/7/2011	4:56:42 PM	PHl3 MFC set to  0.000000
3/7/2011	4:56:42 PM	SiCl4 MFC set to  0.000000
3/7/2011	4:56:42 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	4:56:42 PM	Tube furnace set to 0
3/7/2011	4:56:42 PM	Run finished at 4:56 PM
3/7/2011	4:56:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	5:08:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	5:08:43 PM	Recipe started at 5:08 PM
3/7/2011	5:08:43 PM	Helium valve closed
3/7/2011	5:08:43 PM	H2 valve closed
3/7/2011	5:08:43 PM	BCl3 valve closed
3/7/2011	5:08:43 PM	PH3 valve closed
3/7/2011	5:08:43 PM	SiCl4 pre valve closed
3/7/2011	5:08:43 PM	SiCl4 post valve closed
3/7/2011	5:08:43 PM	Main Vac valve closed
3/7/2011	5:08:43 PM	Bubbler valve closed
3/7/2011	5:08:43 PM	Bypass valve opened
3/7/2011	5:08:43 PM	Helium MFC set to  0.000000
3/7/2011	5:08:43 PM	H2 MFC set to  0.000000
3/7/2011	5:08:43 PM	BCl3 MFC set to  0.000000
3/7/2011	5:08:43 PM	PHl3 MFC set to  0.000000
3/7/2011	5:08:43 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:08:43 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:08:43 PM	Tube furnace set to 0
3/7/2011	5:09:19 PM	Helium valve closed
3/7/2011	5:09:19 PM	H2 valve closed
3/7/2011	5:09:19 PM	BCl3 valve closed
3/7/2011	5:09:19 PM	PH3 valve closed
3/7/2011	5:09:19 PM	SiCl4 pre valve closed
3/7/2011	5:09:19 PM	SiCl4 post valve closed
3/7/2011	5:09:19 PM	Bubbler valve closed
3/7/2011	5:09:19 PM	Main Vac valve opened
3/7/2011	5:09:19 PM	Bypass valve opened
3/7/2011	5:09:19 PM	Helium MFC set to  0.000000
3/7/2011	5:09:19 PM	H2 MFC set to  0.000000
3/7/2011	5:09:19 PM	BCl3 MFC set to  0.000000
3/7/2011	5:09:19 PM	PHl3 MFC set to  0.000000
3/7/2011	5:09:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:09:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:09:19 PM	Tube furnace set to 0
3/7/2011	5:09:19 PM	Run finished at 5:09 PM
3/7/2011	5:09:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	5:11:26 PM	Helium valve opened
3/7/2011	5:11:30 PM	Helium MFC set to  100.000000
3/7/2011	5:11:43 PM	Tube furnace set to 100
3/7/2011	5:11:46 PM	Helium MFC set to  0.000000
3/7/2011	5:11:47 PM	Helium valve closed
3/7/2011	5:12:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	5:12:19 PM	Recipe started at 5:12 PM
3/7/2011	5:12:19 PM	H2 valve closed
3/7/2011	5:12:19 PM	BCl3 valve closed
3/7/2011	5:12:19 PM	PH3 valve closed
3/7/2011	5:12:19 PM	SiCl4 pre valve closed
3/7/2011	5:12:19 PM	SiCl4 post valve closed
3/7/2011	5:12:19 PM	Main Vac valve closed
3/7/2011	5:12:19 PM	Bypass valve closed
3/7/2011	5:12:19 PM	Bubbler valve closed
3/7/2011	5:12:19 PM	Helium valve opened
3/7/2011	5:12:19 PM	Helium MFC set to  500.000000
3/7/2011	5:12:19 PM	H2 MFC set to  0.000000
3/7/2011	5:12:19 PM	BCl3 MFC set to  0.000000
3/7/2011	5:12:19 PM	PHl3 MFC set to  0.000000
3/7/2011	5:12:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:12:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:12:19 PM	Tube furnace set to 0
3/7/2011	5:13:36 PM	Helium valve closed
3/7/2011	5:13:36 PM	H2 valve closed
3/7/2011	5:13:36 PM	BCl3 valve closed
3/7/2011	5:13:36 PM	PH3 valve closed
3/7/2011	5:13:36 PM	SiCl4 pre valve closed
3/7/2011	5:13:36 PM	SiCl4 post valve closed
3/7/2011	5:13:36 PM	Main Vac valve closed
3/7/2011	5:13:36 PM	Bypass valve closed
3/7/2011	5:13:36 PM	Bubbler valve closed
3/7/2011	5:13:36 PM	Helium MFC set to  0.000000
3/7/2011	5:13:36 PM	H2 MFC set to  0.000000
3/7/2011	5:13:36 PM	BCl3 MFC set to  0.000000
3/7/2011	5:13:36 PM	PHl3 MFC set to  0.000000
3/7/2011	5:13:36 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:13:36 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:13:36 PM	Tube furnace set to 0
3/7/2011	5:13:36 PM	Run finished at 5:13 PM
3/7/2011	5:13:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	5:16:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	5:16:17 PM	Recipe started at 5:16 PM
3/7/2011	5:16:17 PM	Helium valve closed
3/7/2011	5:16:17 PM	H2 valve closed
3/7/2011	5:16:17 PM	BCl3 valve closed
3/7/2011	5:16:17 PM	PH3 valve closed
3/7/2011	5:16:17 PM	SiCl4 pre valve closed
3/7/2011	5:16:17 PM	SiCl4 post valve closed
3/7/2011	5:16:17 PM	Main Vac valve closed
3/7/2011	5:16:17 PM	Bubbler valve closed
3/7/2011	5:16:17 PM	Bypass valve opened
3/7/2011	5:16:17 PM	Helium MFC set to  0.000000
3/7/2011	5:16:17 PM	H2 MFC set to  0.000000
3/7/2011	5:16:17 PM	BCl3 MFC set to  0.000000
3/7/2011	5:16:17 PM	PHl3 MFC set to  0.000000
3/7/2011	5:16:17 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:16:17 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:16:17 PM	Tube furnace set to 0
3/7/2011	5:16:47 PM	Helium valve closed
3/7/2011	5:16:47 PM	H2 valve closed
3/7/2011	5:16:47 PM	BCl3 valve closed
3/7/2011	5:16:47 PM	PH3 valve closed
3/7/2011	5:16:47 PM	SiCl4 pre valve closed
3/7/2011	5:16:47 PM	SiCl4 post valve closed
3/7/2011	5:16:47 PM	Bubbler valve closed
3/7/2011	5:16:47 PM	Main Vac valve opened
3/7/2011	5:16:47 PM	Bypass valve opened
3/7/2011	5:16:47 PM	Helium MFC set to  0.000000
3/7/2011	5:16:47 PM	H2 MFC set to  0.000000
3/7/2011	5:16:47 PM	BCl3 MFC set to  0.000000
3/7/2011	5:16:47 PM	PHl3 MFC set to  0.000000
3/7/2011	5:16:47 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:16:47 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:16:47 PM	Tube furnace set to 0
3/7/2011	5:17:47 PM	H2 valve closed
3/7/2011	5:17:47 PM	BCl3 valve closed
3/7/2011	5:17:47 PM	PH3 valve closed
3/7/2011	5:17:47 PM	SiCl4 pre valve closed
3/7/2011	5:17:47 PM	SiCl4 post valve closed
3/7/2011	5:17:47 PM	Bubbler valve closed
3/7/2011	5:17:47 PM	Helium valve opened
3/7/2011	5:17:47 PM	Main Vac valve opened
3/7/2011	5:17:47 PM	Bypass valve opened
3/7/2011	5:17:47 PM	Helium MFC set to  100.000000
3/7/2011	5:17:47 PM	H2 MFC set to  0.000000
3/7/2011	5:17:47 PM	BCl3 MFC set to  0.000000
3/7/2011	5:17:47 PM	PHl3 MFC set to  0.000000
3/7/2011	5:17:47 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:17:47 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:17:47 PM	Tube furnace set to 0
3/7/2011	5:18:47 PM	Helium valve closed
3/7/2011	5:18:47 PM	H2 valve closed
3/7/2011	5:18:47 PM	BCl3 valve closed
3/7/2011	5:18:47 PM	PH3 valve closed
3/7/2011	5:18:47 PM	SiCl4 pre valve closed
3/7/2011	5:18:47 PM	SiCl4 post valve closed
3/7/2011	5:18:47 PM	Bubbler valve closed
3/7/2011	5:18:47 PM	Main Vac valve opened
3/7/2011	5:18:47 PM	Bypass valve opened
3/7/2011	5:18:47 PM	Helium MFC set to  0.000000
3/7/2011	5:18:47 PM	H2 MFC set to  0.000000
3/7/2011	5:18:47 PM	BCl3 MFC set to  0.000000
3/7/2011	5:18:47 PM	PHl3 MFC set to  0.000000
3/7/2011	5:18:47 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:18:47 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:18:48 PM	Tube furnace set to 0
3/7/2011	5:19:48 PM	H2 valve closed
3/7/2011	5:19:48 PM	BCl3 valve closed
3/7/2011	5:19:48 PM	PH3 valve closed
3/7/2011	5:19:48 PM	SiCl4 pre valve closed
3/7/2011	5:19:48 PM	SiCl4 post valve closed
3/7/2011	5:19:48 PM	Bubbler valve closed
3/7/2011	5:19:48 PM	Helium valve opened
3/7/2011	5:19:48 PM	Main Vac valve opened
3/7/2011	5:19:48 PM	Bypass valve opened
3/7/2011	5:19:48 PM	Helium MFC set to  100.000000
3/7/2011	5:19:48 PM	H2 MFC set to  0.000000
3/7/2011	5:19:48 PM	BCl3 MFC set to  0.000000
3/7/2011	5:19:48 PM	PHl3 MFC set to  0.000000
3/7/2011	5:19:48 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:19:48 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:19:48 PM	Tube furnace set to 0
3/7/2011	5:20:48 PM	Helium valve closed
3/7/2011	5:20:48 PM	H2 valve closed
3/7/2011	5:20:48 PM	BCl3 valve closed
3/7/2011	5:20:48 PM	PH3 valve closed
3/7/2011	5:20:48 PM	SiCl4 pre valve closed
3/7/2011	5:20:48 PM	SiCl4 post valve closed
3/7/2011	5:20:48 PM	Bubbler valve closed
3/7/2011	5:20:48 PM	Main Vac valve opened
3/7/2011	5:20:48 PM	Bypass valve opened
3/7/2011	5:20:48 PM	Helium MFC set to  0.000000
3/7/2011	5:20:48 PM	H2 MFC set to  0.000000
3/7/2011	5:20:48 PM	BCl3 MFC set to  0.000000
3/7/2011	5:20:48 PM	PHl3 MFC set to  0.000000
3/7/2011	5:20:48 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:20:48 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:20:48 PM	Tube furnace set to 0
3/7/2011	5:21:33 PM	H2 valve closed
3/7/2011	5:21:33 PM	BCl3 valve closed
3/7/2011	5:21:33 PM	PH3 valve closed
3/7/2011	5:21:33 PM	SiCl4 pre valve closed
3/7/2011	5:21:33 PM	SiCl4 post valve closed
3/7/2011	5:21:33 PM	Bubbler valve closed
3/7/2011	5:21:33 PM	Helium valve opened
3/7/2011	5:21:33 PM	Main Vac valve opened
3/7/2011	5:21:33 PM	Bypass valve opened
3/7/2011	5:21:33 PM	Helium MFC set to  100.000000
3/7/2011	5:21:33 PM	H2 MFC set to  0.000000
3/7/2011	5:21:33 PM	BCl3 MFC set to  0.000000
3/7/2011	5:21:33 PM	PHl3 MFC set to  0.000000
3/7/2011	5:21:33 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:21:33 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:21:33 PM	Tube furnace set to 0
3/7/2011	5:21:34 PM	Helium valve closed
3/7/2011	5:21:34 PM	H2 valve closed
3/7/2011	5:21:34 PM	BCl3 valve closed
3/7/2011	5:21:34 PM	PH3 valve closed
3/7/2011	5:21:34 PM	SiCl4 pre valve closed
3/7/2011	5:21:34 PM	SiCl4 post valve closed
3/7/2011	5:21:34 PM	Bubbler valve closed
3/7/2011	5:21:34 PM	Main Vac valve opened
3/7/2011	5:21:34 PM	Bypass valve opened
3/7/2011	5:21:34 PM	Helium MFC set to  0.000000
3/7/2011	5:21:34 PM	H2 MFC set to  0.000000
3/7/2011	5:21:34 PM	BCl3 MFC set to  0.000000
3/7/2011	5:21:34 PM	PHl3 MFC set to  0.000000
3/7/2011	5:21:34 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:21:34 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:21:34 PM	Tube furnace set to 0
3/7/2011	5:22:34 PM	H2 valve closed
3/7/2011	5:22:34 PM	BCl3 valve closed
3/7/2011	5:22:34 PM	PH3 valve closed
3/7/2011	5:22:34 PM	SiCl4 pre valve closed
3/7/2011	5:22:34 PM	SiCl4 post valve closed
3/7/2011	5:22:34 PM	Bubbler valve closed
3/7/2011	5:22:34 PM	Helium valve opened
3/7/2011	5:22:34 PM	Main Vac valve opened
3/7/2011	5:22:34 PM	Bypass valve opened
3/7/2011	5:22:34 PM	Helium MFC set to  100.000000
3/7/2011	5:22:34 PM	H2 MFC set to  0.000000
3/7/2011	5:22:34 PM	BCl3 MFC set to  0.000000
3/7/2011	5:22:34 PM	PHl3 MFC set to  0.000000
3/7/2011	5:22:34 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:22:34 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:22:34 PM	Tube furnace set to 0
3/7/2011	5:23:34 PM	Helium valve closed
3/7/2011	5:23:34 PM	H2 valve closed
3/7/2011	5:23:34 PM	BCl3 valve closed
3/7/2011	5:23:34 PM	PH3 valve closed
3/7/2011	5:23:34 PM	SiCl4 pre valve closed
3/7/2011	5:23:34 PM	SiCl4 post valve closed
3/7/2011	5:23:34 PM	Bubbler valve closed
3/7/2011	5:23:34 PM	Main Vac valve opened
3/7/2011	5:23:34 PM	Bypass valve opened
3/7/2011	5:23:34 PM	Helium MFC set to  0.000000
3/7/2011	5:23:34 PM	H2 MFC set to  0.000000
3/7/2011	5:23:34 PM	BCl3 MFC set to  0.000000
3/7/2011	5:23:34 PM	PHl3 MFC set to  0.000000
3/7/2011	5:23:34 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:23:34 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:23:35 PM	Tube furnace set to 0
3/7/2011	5:24:35 PM	H2 valve closed
3/7/2011	5:24:35 PM	BCl3 valve closed
3/7/2011	5:24:35 PM	PH3 valve closed
3/7/2011	5:24:35 PM	SiCl4 pre valve closed
3/7/2011	5:24:35 PM	SiCl4 post valve closed
3/7/2011	5:24:35 PM	Bubbler valve closed
3/7/2011	5:24:35 PM	Helium valve opened
3/7/2011	5:24:35 PM	Main Vac valve opened
3/7/2011	5:24:35 PM	Bypass valve opened
3/7/2011	5:24:35 PM	Helium MFC set to  100.000000
3/7/2011	5:24:35 PM	H2 MFC set to  0.000000
3/7/2011	5:24:35 PM	BCl3 MFC set to  0.000000
3/7/2011	5:24:35 PM	PHl3 MFC set to  0.000000
3/7/2011	5:24:35 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:24:35 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:24:35 PM	Tube furnace set to 0
3/7/2011	5:25:35 PM	Helium valve closed
3/7/2011	5:25:35 PM	H2 valve closed
3/7/2011	5:25:35 PM	BCl3 valve closed
3/7/2011	5:25:35 PM	PH3 valve closed
3/7/2011	5:25:35 PM	SiCl4 pre valve closed
3/7/2011	5:25:35 PM	SiCl4 post valve closed
3/7/2011	5:25:35 PM	Bubbler valve closed
3/7/2011	5:25:35 PM	Main Vac valve opened
3/7/2011	5:25:35 PM	Bypass valve opened
3/7/2011	5:25:35 PM	Helium MFC set to  0.000000
3/7/2011	5:25:35 PM	H2 MFC set to  0.000000
3/7/2011	5:25:35 PM	BCl3 MFC set to  0.000000
3/7/2011	5:25:35 PM	PHl3 MFC set to  0.000000
3/7/2011	5:25:35 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:25:35 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:25:35 PM	Tube furnace set to 0
3/7/2011	5:26:35 PM	H2 valve closed
3/7/2011	5:26:35 PM	BCl3 valve closed
3/7/2011	5:26:35 PM	PH3 valve closed
3/7/2011	5:26:35 PM	SiCl4 pre valve closed
3/7/2011	5:26:35 PM	SiCl4 post valve closed
3/7/2011	5:26:35 PM	Bubbler valve closed
3/7/2011	5:26:35 PM	Helium valve opened
3/7/2011	5:26:35 PM	Main Vac valve opened
3/7/2011	5:26:35 PM	Bypass valve opened
3/7/2011	5:26:35 PM	Helium MFC set to  100.000000
3/7/2011	5:26:35 PM	H2 MFC set to  0.000000
3/7/2011	5:26:35 PM	BCl3 MFC set to  0.000000
3/7/2011	5:26:35 PM	PHl3 MFC set to  0.000000
3/7/2011	5:26:35 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:26:35 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:26:35 PM	Tube furnace set to 0
3/7/2011	5:27:35 PM	Helium valve closed
3/7/2011	5:27:35 PM	H2 valve closed
3/7/2011	5:27:35 PM	BCl3 valve closed
3/7/2011	5:27:35 PM	PH3 valve closed
3/7/2011	5:27:35 PM	SiCl4 pre valve closed
3/7/2011	5:27:35 PM	SiCl4 post valve closed
3/7/2011	5:27:35 PM	Bubbler valve closed
3/7/2011	5:27:35 PM	Main Vac valve opened
3/7/2011	5:27:35 PM	Bypass valve opened
3/7/2011	5:27:35 PM	Helium MFC set to  0.000000
3/7/2011	5:27:35 PM	H2 MFC set to  0.000000
3/7/2011	5:27:35 PM	BCl3 MFC set to  0.000000
3/7/2011	5:27:35 PM	PHl3 MFC set to  0.000000
3/7/2011	5:27:35 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:27:35 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:27:35 PM	Tube furnace set to 0
3/7/2011	5:28:35 PM	H2 valve closed
3/7/2011	5:28:35 PM	BCl3 valve closed
3/7/2011	5:28:35 PM	PH3 valve closed
3/7/2011	5:28:35 PM	SiCl4 pre valve closed
3/7/2011	5:28:35 PM	SiCl4 post valve closed
3/7/2011	5:28:35 PM	Bubbler valve closed
3/7/2011	5:28:35 PM	Helium valve opened
3/7/2011	5:28:35 PM	Main Vac valve opened
3/7/2011	5:28:35 PM	Bypass valve opened
3/7/2011	5:28:35 PM	Helium MFC set to  100.000000
3/7/2011	5:28:35 PM	H2 MFC set to  0.000000
3/7/2011	5:28:35 PM	BCl3 MFC set to  0.000000
3/7/2011	5:28:35 PM	PHl3 MFC set to  0.000000
3/7/2011	5:28:35 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:28:35 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:28:35 PM	Tube furnace set to 0
3/7/2011	5:29:36 PM	Helium valve closed
3/7/2011	5:29:36 PM	H2 valve closed
3/7/2011	5:29:36 PM	BCl3 valve closed
3/7/2011	5:29:36 PM	PH3 valve closed
3/7/2011	5:29:36 PM	SiCl4 pre valve closed
3/7/2011	5:29:36 PM	SiCl4 post valve closed
3/7/2011	5:29:36 PM	Bubbler valve closed
3/7/2011	5:29:36 PM	Main Vac valve opened
3/7/2011	5:29:36 PM	Bypass valve opened
3/7/2011	5:29:36 PM	Helium MFC set to  0.000000
3/7/2011	5:29:36 PM	H2 MFC set to  0.000000
3/7/2011	5:29:36 PM	BCl3 MFC set to  0.000000
3/7/2011	5:29:36 PM	PHl3 MFC set to  0.000000
3/7/2011	5:29:36 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:29:36 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:29:36 PM	Tube furnace set to 0
3/7/2011	5:30:36 PM	H2 valve closed
3/7/2011	5:30:36 PM	BCl3 valve closed
3/7/2011	5:30:36 PM	PH3 valve closed
3/7/2011	5:30:36 PM	SiCl4 pre valve closed
3/7/2011	5:30:36 PM	SiCl4 post valve closed
3/7/2011	5:30:36 PM	Bubbler valve closed
3/7/2011	5:30:36 PM	Helium valve opened
3/7/2011	5:30:36 PM	Main Vac valve opened
3/7/2011	5:30:36 PM	Bypass valve opened
3/7/2011	5:30:36 PM	Helium MFC set to  100.000000
3/7/2011	5:30:36 PM	H2 MFC set to  0.000000
3/7/2011	5:30:36 PM	BCl3 MFC set to  0.000000
3/7/2011	5:30:36 PM	PHl3 MFC set to  0.000000
3/7/2011	5:30:36 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:30:36 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:30:36 PM	Tube furnace set to 0
3/7/2011	5:31:36 PM	Helium valve closed
3/7/2011	5:31:36 PM	H2 valve closed
3/7/2011	5:31:36 PM	BCl3 valve closed
3/7/2011	5:31:36 PM	PH3 valve closed
3/7/2011	5:31:36 PM	SiCl4 pre valve closed
3/7/2011	5:31:36 PM	SiCl4 post valve closed
3/7/2011	5:31:36 PM	Bubbler valve closed
3/7/2011	5:31:36 PM	Main Vac valve opened
3/7/2011	5:31:36 PM	Bypass valve opened
3/7/2011	5:31:36 PM	Helium MFC set to  0.000000
3/7/2011	5:31:36 PM	H2 MFC set to  0.000000
3/7/2011	5:31:36 PM	BCl3 MFC set to  0.000000
3/7/2011	5:31:36 PM	PHl3 MFC set to  0.000000
3/7/2011	5:31:36 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:31:36 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:31:36 PM	Tube furnace set to 0
3/7/2011	5:32:36 PM	H2 valve closed
3/7/2011	5:32:36 PM	BCl3 valve closed
3/7/2011	5:32:36 PM	PH3 valve closed
3/7/2011	5:32:36 PM	SiCl4 pre valve closed
3/7/2011	5:32:36 PM	SiCl4 post valve closed
3/7/2011	5:32:36 PM	Bubbler valve closed
3/7/2011	5:32:36 PM	Helium valve opened
3/7/2011	5:32:36 PM	Main Vac valve opened
3/7/2011	5:32:36 PM	Bypass valve opened
3/7/2011	5:32:36 PM	Helium MFC set to  100.000000
3/7/2011	5:32:36 PM	H2 MFC set to  0.000000
3/7/2011	5:32:36 PM	BCl3 MFC set to  0.000000
3/7/2011	5:32:36 PM	PHl3 MFC set to  0.000000
3/7/2011	5:32:36 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:32:36 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:32:36 PM	Tube furnace set to 0
3/7/2011	5:33:36 PM	Helium valve closed
3/7/2011	5:33:36 PM	H2 valve closed
3/7/2011	5:33:36 PM	BCl3 valve closed
3/7/2011	5:33:36 PM	PH3 valve closed
3/7/2011	5:33:36 PM	SiCl4 pre valve closed
3/7/2011	5:33:36 PM	SiCl4 post valve closed
3/7/2011	5:33:36 PM	Bubbler valve closed
3/7/2011	5:33:36 PM	Main Vac valve opened
3/7/2011	5:33:36 PM	Bypass valve opened
3/7/2011	5:33:36 PM	Helium MFC set to  0.000000
3/7/2011	5:33:36 PM	H2 MFC set to  0.000000
3/7/2011	5:33:36 PM	BCl3 MFC set to  0.000000
3/7/2011	5:33:36 PM	PHl3 MFC set to  0.000000
3/7/2011	5:33:36 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:33:36 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:33:36 PM	Tube furnace set to 0
3/7/2011	5:34:36 PM	H2 valve closed
3/7/2011	5:34:36 PM	BCl3 valve closed
3/7/2011	5:34:36 PM	PH3 valve closed
3/7/2011	5:34:36 PM	SiCl4 pre valve closed
3/7/2011	5:34:36 PM	SiCl4 post valve closed
3/7/2011	5:34:36 PM	Bubbler valve closed
3/7/2011	5:34:36 PM	Helium valve opened
3/7/2011	5:34:37 PM	Main Vac valve opened
3/7/2011	5:34:37 PM	Bypass valve opened
3/7/2011	5:34:37 PM	Helium MFC set to  100.000000
3/7/2011	5:34:37 PM	H2 MFC set to  0.000000
3/7/2011	5:34:37 PM	BCl3 MFC set to  0.000000
3/7/2011	5:34:37 PM	PHl3 MFC set to  0.000000
3/7/2011	5:34:37 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:34:37 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:34:37 PM	Tube furnace set to 0
3/7/2011	5:35:37 PM	Helium valve closed
3/7/2011	5:35:37 PM	H2 valve closed
3/7/2011	5:35:37 PM	BCl3 valve closed
3/7/2011	5:35:37 PM	PH3 valve closed
3/7/2011	5:35:37 PM	SiCl4 pre valve closed
3/7/2011	5:35:37 PM	SiCl4 post valve closed
3/7/2011	5:35:37 PM	Bubbler valve closed
3/7/2011	5:35:37 PM	Main Vac valve opened
3/7/2011	5:35:37 PM	Bypass valve opened
3/7/2011	5:35:37 PM	Helium MFC set to  0.000000
3/7/2011	5:35:37 PM	H2 MFC set to  0.000000
3/7/2011	5:35:37 PM	BCl3 MFC set to  0.000000
3/7/2011	5:35:37 PM	PHl3 MFC set to  0.000000
3/7/2011	5:35:37 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:35:37 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:35:37 PM	Tube furnace set to 0
3/7/2011	5:35:38 PM	Run finished at 5:35 PM
3/7/2011	5:35:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	5:36:20 PM	Main Vac valve closed
3/7/2011	5:36:22 PM	Bypass valve closed
3/7/2011	5:36:37 PM	Bypass valve opened
3/7/2011	5:36:39 PM	Main Vac valve opened
3/7/2011	5:36:42 PM	Helium valve opened
3/7/2011	5:36:48 PM	Helium MFC set to  200.000000
3/7/2011	5:36:59 PM	Bypass valve closed
3/7/2011	5:37:05 PM	Main Vac valve closed
3/7/2011	5:37:10 PM	Bypass valve opened
3/7/2011	5:37:11 PM	Main Vac valve opened
3/7/2011	5:37:16 PM	Helium MFC set to  0.000000
3/7/2011	5:37:17 PM	Helium valve closed
3/7/2011	5:38:58 PM	Helium MFC set to  100.000000
3/7/2011	5:38:58 PM	Helium valve opened
3/7/2011	5:39:47 PM	Helium valve closed
3/7/2011	5:39:49 PM	Helium MFC set to  0.000000
3/7/2011	5:42:04 PM	Recipe started at 5:42 PM
3/7/2011	5:42:04 PM	Helium valve closed
3/7/2011	5:42:04 PM	BCl3 valve closed
3/7/2011	5:42:04 PM	PH3 valve closed
3/7/2011	5:42:04 PM	SiCl4 pre valve closed
3/7/2011	5:42:04 PM	SiCl4 post valve closed
3/7/2011	5:42:04 PM	Main Vac valve closed
3/7/2011	5:42:04 PM	Bypass valve closed
3/7/2011	5:42:04 PM	Bubbler valve closed
3/7/2011	5:42:04 PM	H2 valve opened
3/7/2011	5:42:04 PM	Helium MFC set to  0.000000
3/7/2011	5:42:04 PM	H2 MFC set to  500.000000
3/7/2011	5:42:04 PM	BCl3 MFC set to  0.000000
3/7/2011	5:42:04 PM	PHl3 MFC set to  0.000000
3/7/2011	5:42:04 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:42:04 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:42:05 PM	Tube furnace set to 200
3/7/2011	5:43:24 PM	Helium valve closed
3/7/2011	5:43:24 PM	BCl3 valve closed
3/7/2011	5:43:24 PM	PH3 valve closed
3/7/2011	5:43:24 PM	SiCl4 pre valve closed
3/7/2011	5:43:24 PM	SiCl4 post valve closed
3/7/2011	5:43:24 PM	Main Vac valve closed
3/7/2011	5:43:24 PM	Bypass valve closed
3/7/2011	5:43:24 PM	H2 valve opened
3/7/2011	5:43:24 PM	Bubbler valve opened
3/7/2011	5:43:24 PM	Helium MFC set to  0.000000
3/7/2011	5:43:24 PM	H2 MFC set to  400.000000
3/7/2011	5:43:24 PM	BCl3 MFC set to  0.000000
3/7/2011	5:43:24 PM	PHl3 MFC set to  0.000000
3/7/2011	5:43:24 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:43:24 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:43:24 PM	Tube furnace set to 1001
3/7/2011	5:56:44 PM	Helium valve closed
3/7/2011	5:56:44 PM	BCl3 valve closed
3/7/2011	5:56:44 PM	PH3 valve closed
3/7/2011	5:56:44 PM	SiCl4 pre valve closed
3/7/2011	5:56:44 PM	SiCl4 post valve closed
3/7/2011	5:56:44 PM	Main Vac valve closed
3/7/2011	5:56:44 PM	Bypass valve closed
3/7/2011	5:56:44 PM	H2 valve opened
3/7/2011	5:56:44 PM	Bubbler valve opened
3/7/2011	5:56:44 PM	Helium MFC set to  0.000000
3/7/2011	5:56:44 PM	H2 MFC set to  400.000000
3/7/2011	5:56:44 PM	BCl3 MFC set to  0.000000
3/7/2011	5:56:44 PM	PHl3 MFC set to  0.000000
3/7/2011	5:56:44 PM	SiCl4 MFC set to  0.000000
3/7/2011	5:56:44 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	5:56:45 PM	Tube furnace set to 999
3/7/2011	6:03:25 PM	Helium valve closed
3/7/2011	6:03:25 PM	PH3 valve closed
3/7/2011	6:03:25 PM	Main Vac valve closed
3/7/2011	6:03:25 PM	Bypass valve closed
3/7/2011	6:03:25 PM	H2 valve opened
3/7/2011	6:03:25 PM	BCl3 valve opened
3/7/2011	6:03:25 PM	SiCl4 pre valve opened
3/7/2011	6:03:25 PM	SiCl4 post valve opened
3/7/2011	6:03:25 PM	Bubbler valve opened
3/7/2011	6:03:25 PM	Helium MFC set to  0.000000
3/7/2011	6:03:25 PM	H2 MFC set to  500.000000
3/7/2011	6:03:25 PM	BCl3 MFC set to  2.300000
3/7/2011	6:03:25 PM	PHl3 MFC set to  0.000000
3/7/2011	6:03:25 PM	SiCl4 MFC set to  52.000000
3/7/2011	6:03:25 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:03:25 PM	Tube furnace set to 1000
3/7/2011	6:21:25 PM	Helium valve closed
3/7/2011	6:21:25 PM	BCl3 valve closed
3/7/2011	6:21:25 PM	PH3 valve closed
3/7/2011	6:21:25 PM	SiCl4 pre valve closed
3/7/2011	6:21:25 PM	SiCl4 post valve closed
3/7/2011	6:21:25 PM	Main Vac valve closed
3/7/2011	6:21:25 PM	Bypass valve closed
3/7/2011	6:21:25 PM	H2 valve opened
3/7/2011	6:21:25 PM	Bubbler valve opened
3/7/2011	6:21:25 PM	Helium MFC set to  0.000000
3/7/2011	6:21:25 PM	H2 MFC set to  500.000000
3/7/2011	6:21:25 PM	BCl3 MFC set to  0.000000
3/7/2011	6:21:25 PM	PHl3 MFC set to  0.000000
3/7/2011	6:21:25 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:21:25 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:21:25 PM	Tube furnace set to 0
3/7/2011	6:24:18 PM	H2 valve closed
3/7/2011	6:24:18 PM	BCl3 valve closed
3/7/2011	6:24:18 PM	PH3 valve closed
3/7/2011	6:24:18 PM	SiCl4 pre valve closed
3/7/2011	6:24:18 PM	SiCl4 post valve closed
3/7/2011	6:24:18 PM	Main Vac valve closed
3/7/2011	6:24:18 PM	Bypass valve closed
3/7/2011	6:24:18 PM	Helium valve opened
3/7/2011	6:24:18 PM	Bubbler valve opened
3/7/2011	6:24:18 PM	Helium MFC set to  400.000000
3/7/2011	6:24:18 PM	H2 MFC set to  0.000000
3/7/2011	6:24:18 PM	BCl3 MFC set to  0.000000
3/7/2011	6:24:18 PM	PHl3 MFC set to  0.000000
3/7/2011	6:24:18 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:24:18 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:24:18 PM	Tube furnace set to 0
3/7/2011	6:44:18 PM	Helium valve closed
3/7/2011	6:44:18 PM	H2 valve closed
3/7/2011	6:44:18 PM	BCl3 valve closed
3/7/2011	6:44:18 PM	PH3 valve closed
3/7/2011	6:44:18 PM	SiCl4 pre valve closed
3/7/2011	6:44:18 PM	SiCl4 post valve closed
3/7/2011	6:44:18 PM	Main Vac valve closed
3/7/2011	6:44:18 PM	Bypass valve closed
3/7/2011	6:44:18 PM	Bubbler valve closed
3/7/2011	6:44:18 PM	Helium MFC set to  0.000000
3/7/2011	6:44:18 PM	H2 MFC set to  0.000000
3/7/2011	6:44:18 PM	BCl3 MFC set to  0.000000
3/7/2011	6:44:18 PM	PHl3 MFC set to  0.000000
3/7/2011	6:44:18 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:44:18 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:44:19 PM	Tube furnace set to 0
3/7/2011	6:44:19 PM	Run finished at 6:44 PM
3/7/2011	6:45:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	6:45:46 PM	Recipe started at 6:45 PM
3/7/2011	6:45:46 PM	Helium valve closed
3/7/2011	6:45:46 PM	H2 valve closed
3/7/2011	6:45:46 PM	BCl3 valve closed
3/7/2011	6:45:46 PM	PH3 valve closed
3/7/2011	6:45:46 PM	SiCl4 pre valve closed
3/7/2011	6:45:46 PM	SiCl4 post valve closed
3/7/2011	6:45:46 PM	Main Vac valve closed
3/7/2011	6:45:46 PM	Bubbler valve closed
3/7/2011	6:45:46 PM	Bypass valve opened
3/7/2011	6:45:46 PM	Helium MFC set to  0.000000
3/7/2011	6:45:46 PM	H2 MFC set to  0.000000
3/7/2011	6:45:46 PM	BCl3 MFC set to  0.000000
3/7/2011	6:45:46 PM	PHl3 MFC set to  0.000000
3/7/2011	6:45:46 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:45:46 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:45:46 PM	Tube furnace set to 0
3/7/2011	6:46:09 PM	Helium valve closed
3/7/2011	6:46:09 PM	H2 valve closed
3/7/2011	6:46:09 PM	BCl3 valve closed
3/7/2011	6:46:09 PM	PH3 valve closed
3/7/2011	6:46:09 PM	SiCl4 pre valve closed
3/7/2011	6:46:09 PM	SiCl4 post valve closed
3/7/2011	6:46:09 PM	Bubbler valve closed
3/7/2011	6:46:09 PM	Main Vac valve opened
3/7/2011	6:46:09 PM	Bypass valve opened
3/7/2011	6:46:09 PM	Helium MFC set to  0.000000
3/7/2011	6:46:09 PM	H2 MFC set to  0.000000
3/7/2011	6:46:09 PM	BCl3 MFC set to  0.000000
3/7/2011	6:46:09 PM	PHl3 MFC set to  0.000000
3/7/2011	6:46:09 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:46:09 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:46:09 PM	Tube furnace set to 0
3/7/2011	6:46:09 PM	Run finished at 6:46 PM
3/7/2011	6:46:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	6:46:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	6:46:29 PM	Recipe started at 6:46 PM
3/7/2011	6:46:29 PM	H2 valve closed
3/7/2011	6:46:29 PM	BCl3 valve closed
3/7/2011	6:46:29 PM	PH3 valve closed
3/7/2011	6:46:29 PM	SiCl4 pre valve closed
3/7/2011	6:46:29 PM	SiCl4 post valve closed
3/7/2011	6:46:29 PM	Main Vac valve closed
3/7/2011	6:46:29 PM	Bypass valve closed
3/7/2011	6:46:29 PM	Bubbler valve closed
3/7/2011	6:46:29 PM	Helium valve opened
3/7/2011	6:46:29 PM	Helium MFC set to  500.000000
3/7/2011	6:46:29 PM	H2 MFC set to  0.000000
3/7/2011	6:46:29 PM	BCl3 MFC set to  0.000000
3/7/2011	6:46:29 PM	PHl3 MFC set to  0.000000
3/7/2011	6:46:29 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:46:29 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:46:29 PM	Tube furnace set to 0
3/7/2011	6:47:41 PM	Helium valve closed
3/7/2011	6:47:41 PM	H2 valve closed
3/7/2011	6:47:41 PM	BCl3 valve closed
3/7/2011	6:47:41 PM	PH3 valve closed
3/7/2011	6:47:41 PM	SiCl4 pre valve closed
3/7/2011	6:47:41 PM	SiCl4 post valve closed
3/7/2011	6:47:41 PM	Main Vac valve closed
3/7/2011	6:47:41 PM	Bypass valve closed
3/7/2011	6:47:41 PM	Bubbler valve closed
3/7/2011	6:47:41 PM	Helium MFC set to  0.000000
3/7/2011	6:47:41 PM	H2 MFC set to  0.000000
3/7/2011	6:47:41 PM	BCl3 MFC set to  0.000000
3/7/2011	6:47:41 PM	PHl3 MFC set to  0.000000
3/7/2011	6:47:41 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:47:41 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:47:41 PM	Tube furnace set to 0
3/7/2011	6:47:41 PM	Run finished at 6:47 PM
3/7/2011	6:47:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/7/2011	6:51:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	6:51:44 PM	Recipe started at 6:51 PM
3/7/2011	6:51:44 PM	Helium valve closed
3/7/2011	6:51:44 PM	H2 valve closed
3/7/2011	6:51:44 PM	BCl3 valve closed
3/7/2011	6:51:44 PM	PH3 valve closed
3/7/2011	6:51:44 PM	SiCl4 pre valve closed
3/7/2011	6:51:44 PM	SiCl4 post valve closed
3/7/2011	6:51:44 PM	Main Vac valve closed
3/7/2011	6:51:44 PM	Bubbler valve closed
3/7/2011	6:51:44 PM	Bypass valve opened
3/7/2011	6:51:44 PM	Helium MFC set to  0.000000
3/7/2011	6:51:44 PM	H2 MFC set to  0.000000
3/7/2011	6:51:44 PM	BCl3 MFC set to  0.000000
3/7/2011	6:51:44 PM	PHl3 MFC set to  0.000000
3/7/2011	6:51:44 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:51:44 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:51:45 PM	Tube furnace set to 0
3/7/2011	6:52:14 PM	Helium valve closed
3/7/2011	6:52:14 PM	H2 valve closed
3/7/2011	6:52:14 PM	BCl3 valve closed
3/7/2011	6:52:14 PM	PH3 valve closed
3/7/2011	6:52:14 PM	SiCl4 pre valve closed
3/7/2011	6:52:14 PM	SiCl4 post valve closed
3/7/2011	6:52:14 PM	Bubbler valve closed
3/7/2011	6:52:14 PM	Main Vac valve opened
3/7/2011	6:52:14 PM	Bypass valve opened
3/7/2011	6:52:14 PM	Helium MFC set to  0.000000
3/7/2011	6:52:14 PM	H2 MFC set to  0.000000
3/7/2011	6:52:14 PM	BCl3 MFC set to  0.000000
3/7/2011	6:52:14 PM	PHl3 MFC set to  0.000000
3/7/2011	6:52:14 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:52:14 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:52:14 PM	Tube furnace set to 0
3/7/2011	6:53:14 PM	H2 valve closed
3/7/2011	6:53:14 PM	BCl3 valve closed
3/7/2011	6:53:14 PM	PH3 valve closed
3/7/2011	6:53:14 PM	SiCl4 pre valve closed
3/7/2011	6:53:14 PM	SiCl4 post valve closed
3/7/2011	6:53:14 PM	Bubbler valve closed
3/7/2011	6:53:14 PM	Helium valve opened
3/7/2011	6:53:14 PM	Main Vac valve opened
3/7/2011	6:53:14 PM	Bypass valve opened
3/7/2011	6:53:14 PM	Helium MFC set to  100.000000
3/7/2011	6:53:14 PM	H2 MFC set to  0.000000
3/7/2011	6:53:14 PM	BCl3 MFC set to  0.000000
3/7/2011	6:53:14 PM	PHl3 MFC set to  0.000000
3/7/2011	6:53:14 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:53:14 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:53:14 PM	Tube furnace set to 0
3/7/2011	6:54:14 PM	Helium valve closed
3/7/2011	6:54:14 PM	H2 valve closed
3/7/2011	6:54:14 PM	BCl3 valve closed
3/7/2011	6:54:14 PM	PH3 valve closed
3/7/2011	6:54:14 PM	SiCl4 pre valve closed
3/7/2011	6:54:14 PM	SiCl4 post valve closed
3/7/2011	6:54:14 PM	Bubbler valve closed
3/7/2011	6:54:14 PM	Main Vac valve opened
3/7/2011	6:54:14 PM	Bypass valve opened
3/7/2011	6:54:14 PM	Helium MFC set to  0.000000
3/7/2011	6:54:14 PM	H2 MFC set to  0.000000
3/7/2011	6:54:14 PM	BCl3 MFC set to  0.000000
3/7/2011	6:54:14 PM	PHl3 MFC set to  0.000000
3/7/2011	6:54:14 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:54:14 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:54:14 PM	Tube furnace set to 0
3/7/2011	6:55:14 PM	H2 valve closed
3/7/2011	6:55:14 PM	BCl3 valve closed
3/7/2011	6:55:14 PM	PH3 valve closed
3/7/2011	6:55:14 PM	SiCl4 pre valve closed
3/7/2011	6:55:14 PM	SiCl4 post valve closed
3/7/2011	6:55:14 PM	Bubbler valve closed
3/7/2011	6:55:14 PM	Helium valve opened
3/7/2011	6:55:14 PM	Main Vac valve opened
3/7/2011	6:55:14 PM	Bypass valve opened
3/7/2011	6:55:14 PM	Helium MFC set to  100.000000
3/7/2011	6:55:14 PM	H2 MFC set to  0.000000
3/7/2011	6:55:14 PM	BCl3 MFC set to  0.000000
3/7/2011	6:55:14 PM	PHl3 MFC set to  0.000000
3/7/2011	6:55:14 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:55:14 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:55:15 PM	Tube furnace set to 0
3/7/2011	6:56:15 PM	Helium valve closed
3/7/2011	6:56:15 PM	H2 valve closed
3/7/2011	6:56:15 PM	BCl3 valve closed
3/7/2011	6:56:15 PM	PH3 valve closed
3/7/2011	6:56:15 PM	SiCl4 pre valve closed
3/7/2011	6:56:15 PM	SiCl4 post valve closed
3/7/2011	6:56:15 PM	Bubbler valve closed
3/7/2011	6:56:15 PM	Main Vac valve opened
3/7/2011	6:56:15 PM	Bypass valve opened
3/7/2011	6:56:15 PM	Helium MFC set to  0.000000
3/7/2011	6:56:15 PM	H2 MFC set to  0.000000
3/7/2011	6:56:15 PM	BCl3 MFC set to  0.000000
3/7/2011	6:56:15 PM	PHl3 MFC set to  0.000000
3/7/2011	6:56:15 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:56:15 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:56:15 PM	Tube furnace set to 0
3/7/2011	6:57:15 PM	H2 valve closed
3/7/2011	6:57:15 PM	BCl3 valve closed
3/7/2011	6:57:15 PM	PH3 valve closed
3/7/2011	6:57:15 PM	SiCl4 pre valve closed
3/7/2011	6:57:15 PM	SiCl4 post valve closed
3/7/2011	6:57:15 PM	Bubbler valve closed
3/7/2011	6:57:15 PM	Helium valve opened
3/7/2011	6:57:15 PM	Main Vac valve opened
3/7/2011	6:57:15 PM	Bypass valve opened
3/7/2011	6:57:15 PM	Helium MFC set to  100.000000
3/7/2011	6:57:15 PM	H2 MFC set to  0.000000
3/7/2011	6:57:15 PM	BCl3 MFC set to  0.000000
3/7/2011	6:57:15 PM	PHl3 MFC set to  0.000000
3/7/2011	6:57:15 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:57:15 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:57:15 PM	Tube furnace set to 0
3/7/2011	6:58:15 PM	Helium valve closed
3/7/2011	6:58:15 PM	H2 valve closed
3/7/2011	6:58:15 PM	BCl3 valve closed
3/7/2011	6:58:15 PM	PH3 valve closed
3/7/2011	6:58:15 PM	SiCl4 pre valve closed
3/7/2011	6:58:15 PM	SiCl4 post valve closed
3/7/2011	6:58:15 PM	Bubbler valve closed
3/7/2011	6:58:15 PM	Main Vac valve opened
3/7/2011	6:58:15 PM	Bypass valve opened
3/7/2011	6:58:15 PM	Helium MFC set to  0.000000
3/7/2011	6:58:15 PM	H2 MFC set to  0.000000
3/7/2011	6:58:15 PM	BCl3 MFC set to  0.000000
3/7/2011	6:58:15 PM	PHl3 MFC set to  0.000000
3/7/2011	6:58:15 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:58:15 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:58:15 PM	Tube furnace set to 0
3/7/2011	6:59:15 PM	H2 valve closed
3/7/2011	6:59:15 PM	BCl3 valve closed
3/7/2011	6:59:15 PM	PH3 valve closed
3/7/2011	6:59:15 PM	SiCl4 pre valve closed
3/7/2011	6:59:15 PM	SiCl4 post valve closed
3/7/2011	6:59:15 PM	Bubbler valve closed
3/7/2011	6:59:15 PM	Helium valve opened
3/7/2011	6:59:15 PM	Main Vac valve opened
3/7/2011	6:59:15 PM	Bypass valve opened
3/7/2011	6:59:15 PM	Helium MFC set to  100.000000
3/7/2011	6:59:15 PM	H2 MFC set to  0.000000
3/7/2011	6:59:15 PM	BCl3 MFC set to  0.000000
3/7/2011	6:59:15 PM	PHl3 MFC set to  0.000000
3/7/2011	6:59:15 PM	SiCl4 MFC set to  0.000000
3/7/2011	6:59:15 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	6:59:15 PM	Tube furnace set to 0
3/7/2011	7:00:15 PM	Helium valve closed
3/7/2011	7:00:15 PM	H2 valve closed
3/7/2011	7:00:15 PM	BCl3 valve closed
3/7/2011	7:00:15 PM	PH3 valve closed
3/7/2011	7:00:15 PM	SiCl4 pre valve closed
3/7/2011	7:00:15 PM	SiCl4 post valve closed
3/7/2011	7:00:15 PM	Bubbler valve closed
3/7/2011	7:00:15 PM	Main Vac valve opened
3/7/2011	7:00:15 PM	Bypass valve opened
3/7/2011	7:00:15 PM	Helium MFC set to  0.000000
3/7/2011	7:00:15 PM	H2 MFC set to  0.000000
3/7/2011	7:00:15 PM	BCl3 MFC set to  0.000000
3/7/2011	7:00:15 PM	PHl3 MFC set to  0.000000
3/7/2011	7:00:15 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:00:15 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:00:16 PM	Tube furnace set to 0
3/7/2011	7:01:16 PM	H2 valve closed
3/7/2011	7:01:16 PM	BCl3 valve closed
3/7/2011	7:01:16 PM	PH3 valve closed
3/7/2011	7:01:16 PM	SiCl4 pre valve closed
3/7/2011	7:01:16 PM	SiCl4 post valve closed
3/7/2011	7:01:16 PM	Bubbler valve closed
3/7/2011	7:01:16 PM	Helium valve opened
3/7/2011	7:01:16 PM	Main Vac valve opened
3/7/2011	7:01:16 PM	Bypass valve opened
3/7/2011	7:01:16 PM	Helium MFC set to  100.000000
3/7/2011	7:01:16 PM	H2 MFC set to  0.000000
3/7/2011	7:01:16 PM	BCl3 MFC set to  0.000000
3/7/2011	7:01:16 PM	PHl3 MFC set to  0.000000
3/7/2011	7:01:16 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:01:16 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:01:16 PM	Tube furnace set to 0
3/7/2011	7:02:16 PM	Helium valve closed
3/7/2011	7:02:16 PM	H2 valve closed
3/7/2011	7:02:16 PM	BCl3 valve closed
3/7/2011	7:02:16 PM	PH3 valve closed
3/7/2011	7:02:16 PM	SiCl4 pre valve closed
3/7/2011	7:02:16 PM	SiCl4 post valve closed
3/7/2011	7:02:16 PM	Bubbler valve closed
3/7/2011	7:02:16 PM	Main Vac valve opened
3/7/2011	7:02:16 PM	Bypass valve opened
3/7/2011	7:02:16 PM	Helium MFC set to  0.000000
3/7/2011	7:02:16 PM	H2 MFC set to  0.000000
3/7/2011	7:02:16 PM	BCl3 MFC set to  0.000000
3/7/2011	7:02:16 PM	PHl3 MFC set to  0.000000
3/7/2011	7:02:16 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:02:16 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:02:16 PM	Tube furnace set to 0
3/7/2011	7:03:16 PM	H2 valve closed
3/7/2011	7:03:16 PM	BCl3 valve closed
3/7/2011	7:03:16 PM	PH3 valve closed
3/7/2011	7:03:16 PM	SiCl4 pre valve closed
3/7/2011	7:03:16 PM	SiCl4 post valve closed
3/7/2011	7:03:16 PM	Bubbler valve closed
3/7/2011	7:03:16 PM	Helium valve opened
3/7/2011	7:03:16 PM	Main Vac valve opened
3/7/2011	7:03:16 PM	Bypass valve opened
3/7/2011	7:03:16 PM	Helium MFC set to  100.000000
3/7/2011	7:03:16 PM	H2 MFC set to  0.000000
3/7/2011	7:03:16 PM	BCl3 MFC set to  0.000000
3/7/2011	7:03:16 PM	PHl3 MFC set to  0.000000
3/7/2011	7:03:16 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:03:16 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:03:16 PM	Tube furnace set to 0
3/7/2011	7:04:16 PM	Helium valve closed
3/7/2011	7:04:16 PM	H2 valve closed
3/7/2011	7:04:16 PM	BCl3 valve closed
3/7/2011	7:04:16 PM	PH3 valve closed
3/7/2011	7:04:16 PM	SiCl4 pre valve closed
3/7/2011	7:04:16 PM	SiCl4 post valve closed
3/7/2011	7:04:16 PM	Bubbler valve closed
3/7/2011	7:04:16 PM	Main Vac valve opened
3/7/2011	7:04:16 PM	Bypass valve opened
3/7/2011	7:04:16 PM	Helium MFC set to  0.000000
3/7/2011	7:04:16 PM	H2 MFC set to  0.000000
3/7/2011	7:04:16 PM	BCl3 MFC set to  0.000000
3/7/2011	7:04:16 PM	PHl3 MFC set to  0.000000
3/7/2011	7:04:16 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:04:16 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:04:16 PM	Tube furnace set to 0
3/7/2011	7:05:16 PM	H2 valve closed
3/7/2011	7:05:16 PM	BCl3 valve closed
3/7/2011	7:05:16 PM	PH3 valve closed
3/7/2011	7:05:16 PM	SiCl4 pre valve closed
3/7/2011	7:05:16 PM	SiCl4 post valve closed
3/7/2011	7:05:16 PM	Bubbler valve closed
3/7/2011	7:05:16 PM	Helium valve opened
3/7/2011	7:05:16 PM	Main Vac valve opened
3/7/2011	7:05:16 PM	Bypass valve opened
3/7/2011	7:05:16 PM	Helium MFC set to  100.000000
3/7/2011	7:05:16 PM	H2 MFC set to  0.000000
3/7/2011	7:05:16 PM	BCl3 MFC set to  0.000000
3/7/2011	7:05:16 PM	PHl3 MFC set to  0.000000
3/7/2011	7:05:16 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:05:16 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:05:17 PM	Tube furnace set to 0
3/7/2011	7:06:17 PM	Helium valve closed
3/7/2011	7:06:17 PM	H2 valve closed
3/7/2011	7:06:17 PM	BCl3 valve closed
3/7/2011	7:06:17 PM	PH3 valve closed
3/7/2011	7:06:17 PM	SiCl4 pre valve closed
3/7/2011	7:06:17 PM	SiCl4 post valve closed
3/7/2011	7:06:17 PM	Bubbler valve closed
3/7/2011	7:06:17 PM	Main Vac valve opened
3/7/2011	7:06:17 PM	Bypass valve opened
3/7/2011	7:06:17 PM	Helium MFC set to  0.000000
3/7/2011	7:06:17 PM	H2 MFC set to  0.000000
3/7/2011	7:06:17 PM	BCl3 MFC set to  0.000000
3/7/2011	7:06:17 PM	PHl3 MFC set to  0.000000
3/7/2011	7:06:17 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:06:17 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:06:17 PM	Tube furnace set to 0
3/7/2011	7:07:17 PM	H2 valve closed
3/7/2011	7:07:17 PM	BCl3 valve closed
3/7/2011	7:07:17 PM	PH3 valve closed
3/7/2011	7:07:17 PM	SiCl4 pre valve closed
3/7/2011	7:07:17 PM	SiCl4 post valve closed
3/7/2011	7:07:17 PM	Bubbler valve closed
3/7/2011	7:07:17 PM	Helium valve opened
3/7/2011	7:07:17 PM	Main Vac valve opened
3/7/2011	7:07:17 PM	Bypass valve opened
3/7/2011	7:07:17 PM	Helium MFC set to  100.000000
3/7/2011	7:07:17 PM	H2 MFC set to  0.000000
3/7/2011	7:07:17 PM	BCl3 MFC set to  0.000000
3/7/2011	7:07:17 PM	PHl3 MFC set to  0.000000
3/7/2011	7:07:17 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:07:17 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:07:17 PM	Tube furnace set to 0
3/7/2011	7:08:17 PM	Helium valve closed
3/7/2011	7:08:17 PM	H2 valve closed
3/7/2011	7:08:17 PM	BCl3 valve closed
3/7/2011	7:08:17 PM	PH3 valve closed
3/7/2011	7:08:17 PM	SiCl4 pre valve closed
3/7/2011	7:08:17 PM	SiCl4 post valve closed
3/7/2011	7:08:17 PM	Bubbler valve closed
3/7/2011	7:08:17 PM	Main Vac valve opened
3/7/2011	7:08:17 PM	Bypass valve opened
3/7/2011	7:08:17 PM	Helium MFC set to  0.000000
3/7/2011	7:08:17 PM	H2 MFC set to  0.000000
3/7/2011	7:08:17 PM	BCl3 MFC set to  0.000000
3/7/2011	7:08:17 PM	PHl3 MFC set to  0.000000
3/7/2011	7:08:17 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:08:17 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:08:17 PM	Tube furnace set to 0
3/7/2011	7:09:17 PM	H2 valve closed
3/7/2011	7:09:17 PM	BCl3 valve closed
3/7/2011	7:09:17 PM	PH3 valve closed
3/7/2011	7:09:17 PM	SiCl4 pre valve closed
3/7/2011	7:09:17 PM	SiCl4 post valve closed
3/7/2011	7:09:17 PM	Bubbler valve closed
3/7/2011	7:09:17 PM	Helium valve opened
3/7/2011	7:09:17 PM	Main Vac valve opened
3/7/2011	7:09:17 PM	Bypass valve opened
3/7/2011	7:09:17 PM	Helium MFC set to  100.000000
3/7/2011	7:09:17 PM	H2 MFC set to  0.000000
3/7/2011	7:09:17 PM	BCl3 MFC set to  0.000000
3/7/2011	7:09:17 PM	PHl3 MFC set to  0.000000
3/7/2011	7:09:17 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:09:17 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:09:17 PM	Tube furnace set to 0
3/7/2011	7:10:17 PM	Helium valve closed
3/7/2011	7:10:17 PM	H2 valve closed
3/7/2011	7:10:17 PM	BCl3 valve closed
3/7/2011	7:10:17 PM	PH3 valve closed
3/7/2011	7:10:17 PM	SiCl4 pre valve closed
3/7/2011	7:10:17 PM	SiCl4 post valve closed
3/7/2011	7:10:17 PM	Bubbler valve closed
3/7/2011	7:10:17 PM	Main Vac valve opened
3/7/2011	7:10:17 PM	Bypass valve opened
3/7/2011	7:10:17 PM	Helium MFC set to  0.000000
3/7/2011	7:10:17 PM	H2 MFC set to  0.000000
3/7/2011	7:10:17 PM	BCl3 MFC set to  0.000000
3/7/2011	7:10:17 PM	PHl3 MFC set to  0.000000
3/7/2011	7:10:17 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:10:17 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:10:18 PM	Tube furnace set to 0
3/7/2011	7:11:18 PM	H2 valve closed
3/7/2011	7:11:18 PM	BCl3 valve closed
3/7/2011	7:11:18 PM	PH3 valve closed
3/7/2011	7:11:18 PM	SiCl4 pre valve closed
3/7/2011	7:11:18 PM	SiCl4 post valve closed
3/7/2011	7:11:18 PM	Bubbler valve closed
3/7/2011	7:11:18 PM	Helium valve opened
3/7/2011	7:11:18 PM	Main Vac valve opened
3/7/2011	7:11:18 PM	Bypass valve opened
3/7/2011	7:11:18 PM	Helium MFC set to  100.000000
3/7/2011	7:11:18 PM	H2 MFC set to  0.000000
3/7/2011	7:11:18 PM	BCl3 MFC set to  0.000000
3/7/2011	7:11:18 PM	PHl3 MFC set to  0.000000
3/7/2011	7:11:18 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:11:18 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:11:18 PM	Tube furnace set to 0
3/7/2011	7:12:18 PM	Helium valve closed
3/7/2011	7:12:18 PM	H2 valve closed
3/7/2011	7:12:18 PM	BCl3 valve closed
3/7/2011	7:12:18 PM	PH3 valve closed
3/7/2011	7:12:18 PM	SiCl4 pre valve closed
3/7/2011	7:12:18 PM	SiCl4 post valve closed
3/7/2011	7:12:18 PM	Bubbler valve closed
3/7/2011	7:12:18 PM	Main Vac valve opened
3/7/2011	7:12:18 PM	Bypass valve opened
3/7/2011	7:12:18 PM	Helium MFC set to  0.000000
3/7/2011	7:12:18 PM	H2 MFC set to  0.000000
3/7/2011	7:12:18 PM	BCl3 MFC set to  0.000000
3/7/2011	7:12:18 PM	PHl3 MFC set to  0.000000
3/7/2011	7:12:18 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:12:18 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:12:18 PM	Tube furnace set to 0
3/7/2011	7:12:19 PM	Run finished at 7:12 PM
3/7/2011	7:12:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	7:43:27 PM	Helium MFC set to  100.000000
3/7/2011	7:43:28 PM	Helium valve opened
3/7/2011	7:44:45 PM	Helium valve closed
3/7/2011	7:45:43 PM	Recipe started at 7:45 PM
3/7/2011	7:45:43 PM	Helium valve closed
3/7/2011	7:45:43 PM	BCl3 valve closed
3/7/2011	7:45:43 PM	PH3 valve closed
3/7/2011	7:45:43 PM	SiCl4 pre valve closed
3/7/2011	7:45:43 PM	SiCl4 post valve closed
3/7/2011	7:45:43 PM	Main Vac valve closed
3/7/2011	7:45:43 PM	Bypass valve closed
3/7/2011	7:45:43 PM	Bubbler valve closed
3/7/2011	7:45:43 PM	H2 valve opened
3/7/2011	7:45:43 PM	Helium MFC set to  0.000000
3/7/2011	7:45:43 PM	H2 MFC set to  500.000000
3/7/2011	7:45:43 PM	BCl3 MFC set to  0.000000
3/7/2011	7:45:43 PM	PHl3 MFC set to  0.000000
3/7/2011	7:45:43 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:45:43 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:45:43 PM	Tube furnace set to 200
3/7/2011	7:47:05 PM	Helium valve closed
3/7/2011	7:47:05 PM	BCl3 valve closed
3/7/2011	7:47:05 PM	PH3 valve closed
3/7/2011	7:47:05 PM	SiCl4 pre valve closed
3/7/2011	7:47:05 PM	SiCl4 post valve closed
3/7/2011	7:47:05 PM	Main Vac valve closed
3/7/2011	7:47:05 PM	Bypass valve closed
3/7/2011	7:47:05 PM	H2 valve opened
3/7/2011	7:47:05 PM	Bubbler valve opened
3/7/2011	7:47:05 PM	Helium MFC set to  0.000000
3/7/2011	7:47:05 PM	H2 MFC set to  400.000000
3/7/2011	7:47:05 PM	BCl3 MFC set to  0.000000
3/7/2011	7:47:05 PM	PHl3 MFC set to  0.000000
3/7/2011	7:47:05 PM	SiCl4 MFC set to  0.000000
3/7/2011	7:47:05 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	7:47:05 PM	Tube furnace set to 1001
3/7/2011	8:00:25 PM	Helium valve closed
3/7/2011	8:00:25 PM	BCl3 valve closed
3/7/2011	8:00:25 PM	PH3 valve closed
3/7/2011	8:00:25 PM	SiCl4 pre valve closed
3/7/2011	8:00:25 PM	SiCl4 post valve closed
3/7/2011	8:00:25 PM	Main Vac valve closed
3/7/2011	8:00:25 PM	Bypass valve closed
3/7/2011	8:00:25 PM	H2 valve opened
3/7/2011	8:00:25 PM	Bubbler valve opened
3/7/2011	8:00:25 PM	Helium MFC set to  0.000000
3/7/2011	8:00:25 PM	H2 MFC set to  400.000000
3/7/2011	8:00:25 PM	BCl3 MFC set to  0.000000
3/7/2011	8:00:25 PM	PHl3 MFC set to  0.000000
3/7/2011	8:00:25 PM	SiCl4 MFC set to  0.000000
3/7/2011	8:00:25 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	8:00:25 PM	Tube furnace set to 999
3/7/2011	8:08:45 PM	Helium valve closed
3/7/2011	8:08:45 PM	PH3 valve closed
3/7/2011	8:08:45 PM	Main Vac valve closed
3/7/2011	8:08:45 PM	Bypass valve closed
3/7/2011	8:08:45 PM	H2 valve opened
3/7/2011	8:08:45 PM	BCl3 valve opened
3/7/2011	8:08:45 PM	SiCl4 pre valve opened
3/7/2011	8:08:45 PM	SiCl4 post valve opened
3/7/2011	8:08:45 PM	Bubbler valve opened
3/7/2011	8:08:45 PM	Helium MFC set to  0.000000
3/7/2011	8:08:45 PM	H2 MFC set to  500.000000
3/7/2011	8:08:45 PM	BCl3 MFC set to  2.300000
3/7/2011	8:08:45 PM	PHl3 MFC set to  0.000000
3/7/2011	8:08:45 PM	SiCl4 MFC set to  52.000000
3/7/2011	8:08:45 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	8:08:45 PM	Tube furnace set to 1000
3/7/2011	8:26:45 PM	Helium valve closed
3/7/2011	8:26:45 PM	BCl3 valve closed
3/7/2011	8:26:45 PM	PH3 valve closed
3/7/2011	8:26:45 PM	SiCl4 pre valve closed
3/7/2011	8:26:45 PM	SiCl4 post valve closed
3/7/2011	8:26:45 PM	Main Vac valve closed
3/7/2011	8:26:45 PM	Bypass valve closed
3/7/2011	8:26:45 PM	H2 valve opened
3/7/2011	8:26:45 PM	Bubbler valve opened
3/7/2011	8:26:45 PM	Helium MFC set to  0.000000
3/7/2011	8:26:45 PM	H2 MFC set to  500.000000
3/7/2011	8:26:45 PM	BCl3 MFC set to  0.000000
3/7/2011	8:26:45 PM	PHl3 MFC set to  0.000000
3/7/2011	8:26:45 PM	SiCl4 MFC set to  0.000000
3/7/2011	8:26:45 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	8:26:45 PM	Tube furnace set to 0
3/7/2011	8:29:41 PM	H2 valve closed
3/7/2011	8:29:41 PM	BCl3 valve closed
3/7/2011	8:29:41 PM	PH3 valve closed
3/7/2011	8:29:41 PM	SiCl4 pre valve closed
3/7/2011	8:29:41 PM	SiCl4 post valve closed
3/7/2011	8:29:41 PM	Main Vac valve closed
3/7/2011	8:29:41 PM	Bypass valve closed
3/7/2011	8:29:41 PM	Helium valve opened
3/7/2011	8:29:41 PM	Bubbler valve opened
3/7/2011	8:29:41 PM	Helium MFC set to  400.000000
3/7/2011	8:29:41 PM	H2 MFC set to  0.000000
3/7/2011	8:29:41 PM	BCl3 MFC set to  0.000000
3/7/2011	8:29:41 PM	PHl3 MFC set to  0.000000
3/7/2011	8:29:41 PM	SiCl4 MFC set to  0.000000
3/7/2011	8:29:41 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	8:29:41 PM	Tube furnace set to 0
3/7/2011	8:49:41 PM	Helium valve closed
3/7/2011	8:49:41 PM	H2 valve closed
3/7/2011	8:49:41 PM	BCl3 valve closed
3/7/2011	8:49:41 PM	PH3 valve closed
3/7/2011	8:49:41 PM	SiCl4 pre valve closed
3/7/2011	8:49:41 PM	SiCl4 post valve closed
3/7/2011	8:49:41 PM	Main Vac valve closed
3/7/2011	8:49:41 PM	Bypass valve closed
3/7/2011	8:49:41 PM	Bubbler valve closed
3/7/2011	8:49:41 PM	Helium MFC set to  0.000000
3/7/2011	8:49:41 PM	H2 MFC set to  0.000000
3/7/2011	8:49:41 PM	BCl3 MFC set to  0.000000
3/7/2011	8:49:41 PM	PHl3 MFC set to  0.000000
3/7/2011	8:49:41 PM	SiCl4 MFC set to  0.000000
3/7/2011	8:49:41 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	8:49:42 PM	Tube furnace set to 0
3/7/2011	8:49:42 PM	Run finished at 8:49 PM
3/7/2011	9:01:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	9:01:46 PM	Recipe started at 9:01 PM
3/7/2011	9:01:46 PM	Helium valve closed
3/7/2011	9:01:46 PM	H2 valve closed
3/7/2011	9:01:46 PM	BCl3 valve closed
3/7/2011	9:01:46 PM	PH3 valve closed
3/7/2011	9:01:46 PM	SiCl4 pre valve closed
3/7/2011	9:01:46 PM	SiCl4 post valve closed
3/7/2011	9:01:46 PM	Main Vac valve closed
3/7/2011	9:01:46 PM	Bubbler valve closed
3/7/2011	9:01:46 PM	Bypass valve opened
3/7/2011	9:01:46 PM	Helium MFC set to  0.000000
3/7/2011	9:01:46 PM	H2 MFC set to  0.000000
3/7/2011	9:01:46 PM	BCl3 MFC set to  0.000000
3/7/2011	9:01:46 PM	PHl3 MFC set to  0.000000
3/7/2011	9:01:46 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:01:46 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:01:46 PM	Tube furnace set to 0
3/7/2011	9:02:18 PM	Helium valve closed
3/7/2011	9:02:18 PM	H2 valve closed
3/7/2011	9:02:18 PM	BCl3 valve closed
3/7/2011	9:02:18 PM	PH3 valve closed
3/7/2011	9:02:18 PM	SiCl4 pre valve closed
3/7/2011	9:02:18 PM	SiCl4 post valve closed
3/7/2011	9:02:18 PM	Bubbler valve closed
3/7/2011	9:02:18 PM	Main Vac valve opened
3/7/2011	9:02:18 PM	Bypass valve opened
3/7/2011	9:02:18 PM	Helium MFC set to  0.000000
3/7/2011	9:02:18 PM	H2 MFC set to  0.000000
3/7/2011	9:02:18 PM	BCl3 MFC set to  0.000000
3/7/2011	9:02:18 PM	PHl3 MFC set to  0.000000
3/7/2011	9:02:18 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:02:18 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:02:19 PM	Tube furnace set to 0
3/7/2011	9:03:19 PM	H2 valve closed
3/7/2011	9:03:19 PM	BCl3 valve closed
3/7/2011	9:03:19 PM	PH3 valve closed
3/7/2011	9:03:19 PM	SiCl4 pre valve closed
3/7/2011	9:03:19 PM	SiCl4 post valve closed
3/7/2011	9:03:19 PM	Bubbler valve closed
3/7/2011	9:03:19 PM	Helium valve opened
3/7/2011	9:03:19 PM	Main Vac valve opened
3/7/2011	9:03:19 PM	Bypass valve opened
3/7/2011	9:03:19 PM	Helium MFC set to  100.000000
3/7/2011	9:03:19 PM	H2 MFC set to  0.000000
3/7/2011	9:03:19 PM	BCl3 MFC set to  0.000000
3/7/2011	9:03:19 PM	PHl3 MFC set to  0.000000
3/7/2011	9:03:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:03:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:03:19 PM	Tube furnace set to 0
3/7/2011	9:04:19 PM	Helium valve closed
3/7/2011	9:04:19 PM	H2 valve closed
3/7/2011	9:04:19 PM	BCl3 valve closed
3/7/2011	9:04:19 PM	PH3 valve closed
3/7/2011	9:04:19 PM	SiCl4 pre valve closed
3/7/2011	9:04:19 PM	SiCl4 post valve closed
3/7/2011	9:04:19 PM	Bubbler valve closed
3/7/2011	9:04:19 PM	Main Vac valve opened
3/7/2011	9:04:19 PM	Bypass valve opened
3/7/2011	9:04:19 PM	Helium MFC set to  0.000000
3/7/2011	9:04:19 PM	H2 MFC set to  0.000000
3/7/2011	9:04:19 PM	BCl3 MFC set to  0.000000
3/7/2011	9:04:19 PM	PHl3 MFC set to  0.000000
3/7/2011	9:04:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:04:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:04:19 PM	Tube furnace set to 0
3/7/2011	9:05:19 PM	H2 valve closed
3/7/2011	9:05:19 PM	BCl3 valve closed
3/7/2011	9:05:19 PM	PH3 valve closed
3/7/2011	9:05:19 PM	SiCl4 pre valve closed
3/7/2011	9:05:19 PM	SiCl4 post valve closed
3/7/2011	9:05:19 PM	Bubbler valve closed
3/7/2011	9:05:19 PM	Helium valve opened
3/7/2011	9:05:19 PM	Main Vac valve opened
3/7/2011	9:05:19 PM	Bypass valve opened
3/7/2011	9:05:19 PM	Helium MFC set to  100.000000
3/7/2011	9:05:19 PM	H2 MFC set to  0.000000
3/7/2011	9:05:19 PM	BCl3 MFC set to  0.000000
3/7/2011	9:05:19 PM	PHl3 MFC set to  0.000000
3/7/2011	9:05:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:05:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:05:19 PM	Tube furnace set to 0
3/7/2011	9:06:19 PM	Helium valve closed
3/7/2011	9:06:19 PM	H2 valve closed
3/7/2011	9:06:19 PM	BCl3 valve closed
3/7/2011	9:06:19 PM	PH3 valve closed
3/7/2011	9:06:19 PM	SiCl4 pre valve closed
3/7/2011	9:06:19 PM	SiCl4 post valve closed
3/7/2011	9:06:19 PM	Bubbler valve closed
3/7/2011	9:06:19 PM	Main Vac valve opened
3/7/2011	9:06:19 PM	Bypass valve opened
3/7/2011	9:06:19 PM	Helium MFC set to  0.000000
3/7/2011	9:06:19 PM	H2 MFC set to  0.000000
3/7/2011	9:06:19 PM	BCl3 MFC set to  0.000000
3/7/2011	9:06:19 PM	PHl3 MFC set to  0.000000
3/7/2011	9:06:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:06:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:06:19 PM	Tube furnace set to 0
3/7/2011	9:07:19 PM	H2 valve closed
3/7/2011	9:07:19 PM	BCl3 valve closed
3/7/2011	9:07:19 PM	PH3 valve closed
3/7/2011	9:07:19 PM	SiCl4 pre valve closed
3/7/2011	9:07:19 PM	SiCl4 post valve closed
3/7/2011	9:07:19 PM	Bubbler valve closed
3/7/2011	9:07:19 PM	Helium valve opened
3/7/2011	9:07:19 PM	Main Vac valve opened
3/7/2011	9:07:19 PM	Bypass valve opened
3/7/2011	9:07:19 PM	Helium MFC set to  100.000000
3/7/2011	9:07:19 PM	H2 MFC set to  0.000000
3/7/2011	9:07:19 PM	BCl3 MFC set to  0.000000
3/7/2011	9:07:19 PM	PHl3 MFC set to  0.000000
3/7/2011	9:07:19 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:07:19 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:07:20 PM	Tube furnace set to 0
3/7/2011	9:08:20 PM	Helium valve closed
3/7/2011	9:08:20 PM	H2 valve closed
3/7/2011	9:08:20 PM	BCl3 valve closed
3/7/2011	9:08:20 PM	PH3 valve closed
3/7/2011	9:08:20 PM	SiCl4 pre valve closed
3/7/2011	9:08:20 PM	SiCl4 post valve closed
3/7/2011	9:08:20 PM	Bubbler valve closed
3/7/2011	9:08:20 PM	Main Vac valve opened
3/7/2011	9:08:20 PM	Bypass valve opened
3/7/2011	9:08:20 PM	Helium MFC set to  0.000000
3/7/2011	9:08:20 PM	H2 MFC set to  0.000000
3/7/2011	9:08:20 PM	BCl3 MFC set to  0.000000
3/7/2011	9:08:20 PM	PHl3 MFC set to  0.000000
3/7/2011	9:08:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:08:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:08:20 PM	Tube furnace set to 0
3/7/2011	9:09:20 PM	H2 valve closed
3/7/2011	9:09:20 PM	BCl3 valve closed
3/7/2011	9:09:20 PM	PH3 valve closed
3/7/2011	9:09:20 PM	SiCl4 pre valve closed
3/7/2011	9:09:20 PM	SiCl4 post valve closed
3/7/2011	9:09:20 PM	Bubbler valve closed
3/7/2011	9:09:20 PM	Helium valve opened
3/7/2011	9:09:20 PM	Main Vac valve opened
3/7/2011	9:09:20 PM	Bypass valve opened
3/7/2011	9:09:20 PM	Helium MFC set to  100.000000
3/7/2011	9:09:20 PM	H2 MFC set to  0.000000
3/7/2011	9:09:20 PM	BCl3 MFC set to  0.000000
3/7/2011	9:09:20 PM	PHl3 MFC set to  0.000000
3/7/2011	9:09:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:09:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:09:20 PM	Tube furnace set to 0
3/7/2011	9:10:20 PM	Helium valve closed
3/7/2011	9:10:20 PM	H2 valve closed
3/7/2011	9:10:20 PM	BCl3 valve closed
3/7/2011	9:10:20 PM	PH3 valve closed
3/7/2011	9:10:20 PM	SiCl4 pre valve closed
3/7/2011	9:10:20 PM	SiCl4 post valve closed
3/7/2011	9:10:20 PM	Bubbler valve closed
3/7/2011	9:10:20 PM	Main Vac valve opened
3/7/2011	9:10:20 PM	Bypass valve opened
3/7/2011	9:10:20 PM	Helium MFC set to  0.000000
3/7/2011	9:10:20 PM	H2 MFC set to  0.000000
3/7/2011	9:10:20 PM	BCl3 MFC set to  0.000000
3/7/2011	9:10:20 PM	PHl3 MFC set to  0.000000
3/7/2011	9:10:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:10:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:10:20 PM	Tube furnace set to 0
3/7/2011	9:11:20 PM	H2 valve closed
3/7/2011	9:11:20 PM	BCl3 valve closed
3/7/2011	9:11:20 PM	PH3 valve closed
3/7/2011	9:11:20 PM	SiCl4 pre valve closed
3/7/2011	9:11:20 PM	SiCl4 post valve closed
3/7/2011	9:11:20 PM	Bubbler valve closed
3/7/2011	9:11:20 PM	Helium valve opened
3/7/2011	9:11:20 PM	Main Vac valve opened
3/7/2011	9:11:20 PM	Bypass valve opened
3/7/2011	9:11:20 PM	Helium MFC set to  100.000000
3/7/2011	9:11:20 PM	H2 MFC set to  0.000000
3/7/2011	9:11:20 PM	BCl3 MFC set to  0.000000
3/7/2011	9:11:20 PM	PHl3 MFC set to  0.000000
3/7/2011	9:11:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:11:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:11:20 PM	Tube furnace set to 0
3/7/2011	9:12:20 PM	Helium valve closed
3/7/2011	9:12:20 PM	H2 valve closed
3/7/2011	9:12:20 PM	BCl3 valve closed
3/7/2011	9:12:20 PM	PH3 valve closed
3/7/2011	9:12:20 PM	SiCl4 pre valve closed
3/7/2011	9:12:20 PM	SiCl4 post valve closed
3/7/2011	9:12:20 PM	Bubbler valve closed
3/7/2011	9:12:20 PM	Main Vac valve opened
3/7/2011	9:12:20 PM	Bypass valve opened
3/7/2011	9:12:20 PM	Helium MFC set to  0.000000
3/7/2011	9:12:20 PM	H2 MFC set to  0.000000
3/7/2011	9:12:20 PM	BCl3 MFC set to  0.000000
3/7/2011	9:12:20 PM	PHl3 MFC set to  0.000000
3/7/2011	9:12:20 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:12:20 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:12:21 PM	Tube furnace set to 0
3/7/2011	9:13:21 PM	H2 valve closed
3/7/2011	9:13:21 PM	BCl3 valve closed
3/7/2011	9:13:21 PM	PH3 valve closed
3/7/2011	9:13:21 PM	SiCl4 pre valve closed
3/7/2011	9:13:21 PM	SiCl4 post valve closed
3/7/2011	9:13:21 PM	Bubbler valve closed
3/7/2011	9:13:21 PM	Helium valve opened
3/7/2011	9:13:21 PM	Main Vac valve opened
3/7/2011	9:13:21 PM	Bypass valve opened
3/7/2011	9:13:21 PM	Helium MFC set to  100.000000
3/7/2011	9:13:21 PM	H2 MFC set to  0.000000
3/7/2011	9:13:21 PM	BCl3 MFC set to  0.000000
3/7/2011	9:13:21 PM	PHl3 MFC set to  0.000000
3/7/2011	9:13:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:13:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:13:21 PM	Tube furnace set to 0
3/7/2011	9:14:21 PM	Helium valve closed
3/7/2011	9:14:21 PM	H2 valve closed
3/7/2011	9:14:21 PM	BCl3 valve closed
3/7/2011	9:14:21 PM	PH3 valve closed
3/7/2011	9:14:21 PM	SiCl4 pre valve closed
3/7/2011	9:14:21 PM	SiCl4 post valve closed
3/7/2011	9:14:21 PM	Bubbler valve closed
3/7/2011	9:14:21 PM	Main Vac valve opened
3/7/2011	9:14:21 PM	Bypass valve opened
3/7/2011	9:14:21 PM	Helium MFC set to  0.000000
3/7/2011	9:14:21 PM	H2 MFC set to  0.000000
3/7/2011	9:14:21 PM	BCl3 MFC set to  0.000000
3/7/2011	9:14:21 PM	PHl3 MFC set to  0.000000
3/7/2011	9:14:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:14:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:14:21 PM	Tube furnace set to 0
3/7/2011	9:15:21 PM	H2 valve closed
3/7/2011	9:15:21 PM	BCl3 valve closed
3/7/2011	9:15:21 PM	PH3 valve closed
3/7/2011	9:15:21 PM	SiCl4 pre valve closed
3/7/2011	9:15:21 PM	SiCl4 post valve closed
3/7/2011	9:15:21 PM	Bubbler valve closed
3/7/2011	9:15:21 PM	Helium valve opened
3/7/2011	9:15:21 PM	Main Vac valve opened
3/7/2011	9:15:21 PM	Bypass valve opened
3/7/2011	9:15:21 PM	Helium MFC set to  100.000000
3/7/2011	9:15:21 PM	H2 MFC set to  0.000000
3/7/2011	9:15:21 PM	BCl3 MFC set to  0.000000
3/7/2011	9:15:21 PM	PHl3 MFC set to  0.000000
3/7/2011	9:15:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:15:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:15:21 PM	Tube furnace set to 0
3/7/2011	9:16:21 PM	Helium valve closed
3/7/2011	9:16:21 PM	H2 valve closed
3/7/2011	9:16:21 PM	BCl3 valve closed
3/7/2011	9:16:21 PM	PH3 valve closed
3/7/2011	9:16:21 PM	SiCl4 pre valve closed
3/7/2011	9:16:21 PM	SiCl4 post valve closed
3/7/2011	9:16:21 PM	Bubbler valve closed
3/7/2011	9:16:21 PM	Main Vac valve opened
3/7/2011	9:16:21 PM	Bypass valve opened
3/7/2011	9:16:21 PM	Helium MFC set to  0.000000
3/7/2011	9:16:21 PM	H2 MFC set to  0.000000
3/7/2011	9:16:21 PM	BCl3 MFC set to  0.000000
3/7/2011	9:16:21 PM	PHl3 MFC set to  0.000000
3/7/2011	9:16:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:16:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:16:21 PM	Tube furnace set to 0
3/7/2011	9:17:21 PM	H2 valve closed
3/7/2011	9:17:21 PM	BCl3 valve closed
3/7/2011	9:17:21 PM	PH3 valve closed
3/7/2011	9:17:21 PM	SiCl4 pre valve closed
3/7/2011	9:17:21 PM	SiCl4 post valve closed
3/7/2011	9:17:21 PM	Bubbler valve closed
3/7/2011	9:17:21 PM	Helium valve opened
3/7/2011	9:17:21 PM	Main Vac valve opened
3/7/2011	9:17:21 PM	Bypass valve opened
3/7/2011	9:17:21 PM	Helium MFC set to  100.000000
3/7/2011	9:17:21 PM	H2 MFC set to  0.000000
3/7/2011	9:17:21 PM	BCl3 MFC set to  0.000000
3/7/2011	9:17:21 PM	PHl3 MFC set to  0.000000
3/7/2011	9:17:21 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:17:21 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:17:22 PM	Tube furnace set to 0
3/7/2011	9:18:22 PM	Helium valve closed
3/7/2011	9:18:22 PM	H2 valve closed
3/7/2011	9:18:22 PM	BCl3 valve closed
3/7/2011	9:18:22 PM	PH3 valve closed
3/7/2011	9:18:22 PM	SiCl4 pre valve closed
3/7/2011	9:18:22 PM	SiCl4 post valve closed
3/7/2011	9:18:22 PM	Bubbler valve closed
3/7/2011	9:18:22 PM	Main Vac valve opened
3/7/2011	9:18:22 PM	Bypass valve opened
3/7/2011	9:18:22 PM	Helium MFC set to  0.000000
3/7/2011	9:18:22 PM	H2 MFC set to  0.000000
3/7/2011	9:18:22 PM	BCl3 MFC set to  0.000000
3/7/2011	9:18:22 PM	PHl3 MFC set to  0.000000
3/7/2011	9:18:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:18:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:18:22 PM	Tube furnace set to 0
3/7/2011	9:19:22 PM	H2 valve closed
3/7/2011	9:19:22 PM	BCl3 valve closed
3/7/2011	9:19:22 PM	PH3 valve closed
3/7/2011	9:19:22 PM	SiCl4 pre valve closed
3/7/2011	9:19:22 PM	SiCl4 post valve closed
3/7/2011	9:19:22 PM	Bubbler valve closed
3/7/2011	9:19:22 PM	Helium valve opened
3/7/2011	9:19:22 PM	Main Vac valve opened
3/7/2011	9:19:22 PM	Bypass valve opened
3/7/2011	9:19:22 PM	Helium MFC set to  100.000000
3/7/2011	9:19:22 PM	H2 MFC set to  0.000000
3/7/2011	9:19:22 PM	BCl3 MFC set to  0.000000
3/7/2011	9:19:22 PM	PHl3 MFC set to  0.000000
3/7/2011	9:19:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:19:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:19:22 PM	Tube furnace set to 0
3/7/2011	9:20:22 PM	Helium valve closed
3/7/2011	9:20:22 PM	H2 valve closed
3/7/2011	9:20:22 PM	BCl3 valve closed
3/7/2011	9:20:22 PM	PH3 valve closed
3/7/2011	9:20:22 PM	SiCl4 pre valve closed
3/7/2011	9:20:22 PM	SiCl4 post valve closed
3/7/2011	9:20:22 PM	Bubbler valve closed
3/7/2011	9:20:22 PM	Main Vac valve opened
3/7/2011	9:20:22 PM	Bypass valve opened
3/7/2011	9:20:22 PM	Helium MFC set to  0.000000
3/7/2011	9:20:22 PM	H2 MFC set to  0.000000
3/7/2011	9:20:22 PM	BCl3 MFC set to  0.000000
3/7/2011	9:20:22 PM	PHl3 MFC set to  0.000000
3/7/2011	9:20:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:20:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:20:22 PM	Tube furnace set to 0
3/7/2011	9:21:22 PM	H2 valve closed
3/7/2011	9:21:22 PM	BCl3 valve closed
3/7/2011	9:21:22 PM	PH3 valve closed
3/7/2011	9:21:22 PM	SiCl4 pre valve closed
3/7/2011	9:21:22 PM	SiCl4 post valve closed
3/7/2011	9:21:22 PM	Bubbler valve closed
3/7/2011	9:21:22 PM	Helium valve opened
3/7/2011	9:21:22 PM	Main Vac valve opened
3/7/2011	9:21:22 PM	Bypass valve opened
3/7/2011	9:21:22 PM	Helium MFC set to  100.000000
3/7/2011	9:21:22 PM	H2 MFC set to  0.000000
3/7/2011	9:21:22 PM	BCl3 MFC set to  0.000000
3/7/2011	9:21:22 PM	PHl3 MFC set to  0.000000
3/7/2011	9:21:22 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:21:22 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:21:22 PM	Tube furnace set to 0
3/7/2011	9:22:08 PM	Helium valve closed
3/7/2011	9:22:08 PM	H2 valve closed
3/7/2011	9:22:08 PM	BCl3 valve closed
3/7/2011	9:22:08 PM	PH3 valve closed
3/7/2011	9:22:08 PM	SiCl4 pre valve closed
3/7/2011	9:22:08 PM	SiCl4 post valve closed
3/7/2011	9:22:08 PM	Bubbler valve closed
3/7/2011	9:22:08 PM	Main Vac valve opened
3/7/2011	9:22:08 PM	Bypass valve opened
3/7/2011	9:22:08 PM	Helium MFC set to  0.000000
3/7/2011	9:22:08 PM	H2 MFC set to  0.000000
3/7/2011	9:22:08 PM	BCl3 MFC set to  0.000000
3/7/2011	9:22:08 PM	PHl3 MFC set to  0.000000
3/7/2011	9:22:08 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:22:08 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:22:08 PM	Tube furnace set to 0
3/7/2011	9:22:09 PM	Run finished at 9:22 PM
3/7/2011	9:22:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/7/2011	9:24:18 PM	Helium MFC set to  100.000000
3/7/2011	9:24:19 PM	Helium valve opened
3/7/2011	9:24:50 PM	Helium valve closed
3/7/2011	9:24:53 PM	Helium MFC set to  0.000000
3/7/2011	9:26:08 PM	Helium MFC set to  50.000000
3/7/2011	9:26:09 PM	Helium valve opened
3/7/2011	9:26:54 PM	Helium valve closed
3/7/2011	9:26:58 PM	Helium MFC set to  0.000000
3/7/2011	9:26:59 PM	Helium valve opened
3/7/2011	9:27:00 PM	Helium valve closed
3/7/2011	9:27:01 PM	Helium valve opened
3/7/2011	9:27:01 PM	Helium valve closed
3/7/2011	9:29:08 PM	Recipe started at 9:29 PM
3/7/2011	9:29:08 PM	Helium valve closed
3/7/2011	9:29:08 PM	BCl3 valve closed
3/7/2011	9:29:08 PM	PH3 valve closed
3/7/2011	9:29:08 PM	SiCl4 pre valve closed
3/7/2011	9:29:08 PM	SiCl4 post valve closed
3/7/2011	9:29:08 PM	Main Vac valve closed
3/7/2011	9:29:08 PM	Bypass valve closed
3/7/2011	9:29:08 PM	Bubbler valve closed
3/7/2011	9:29:08 PM	H2 valve opened
3/7/2011	9:29:08 PM	Helium MFC set to  0.000000
3/7/2011	9:29:08 PM	H2 MFC set to  500.000000
3/7/2011	9:29:08 PM	BCl3 MFC set to  0.000000
3/7/2011	9:29:08 PM	PHl3 MFC set to  0.000000
3/7/2011	9:29:08 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:29:08 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:29:08 PM	Tube furnace set to 200
3/7/2011	9:30:28 PM	Helium valve closed
3/7/2011	9:30:28 PM	BCl3 valve closed
3/7/2011	9:30:28 PM	PH3 valve closed
3/7/2011	9:30:28 PM	SiCl4 pre valve closed
3/7/2011	9:30:28 PM	SiCl4 post valve closed
3/7/2011	9:30:28 PM	Main Vac valve closed
3/7/2011	9:30:28 PM	Bypass valve closed
3/7/2011	9:30:28 PM	H2 valve opened
3/7/2011	9:30:28 PM	Bubbler valve opened
3/7/2011	9:30:29 PM	Helium MFC set to  0.000000
3/7/2011	9:30:29 PM	H2 MFC set to  400.000000
3/7/2011	9:30:29 PM	BCl3 MFC set to  0.000000
3/7/2011	9:30:29 PM	PHl3 MFC set to  0.000000
3/7/2011	9:30:29 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:30:29 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:30:29 PM	Tube furnace set to 1001
3/7/2011	9:43:49 PM	Helium valve closed
3/7/2011	9:43:49 PM	BCl3 valve closed
3/7/2011	9:43:49 PM	PH3 valve closed
3/7/2011	9:43:49 PM	SiCl4 pre valve closed
3/7/2011	9:43:49 PM	SiCl4 post valve closed
3/7/2011	9:43:49 PM	Main Vac valve closed
3/7/2011	9:43:49 PM	Bypass valve closed
3/7/2011	9:43:49 PM	H2 valve opened
3/7/2011	9:43:49 PM	Bubbler valve opened
3/7/2011	9:43:49 PM	Helium MFC set to  0.000000
3/7/2011	9:43:49 PM	H2 MFC set to  400.000000
3/7/2011	9:43:49 PM	BCl3 MFC set to  0.000000
3/7/2011	9:43:49 PM	PHl3 MFC set to  0.000000
3/7/2011	9:43:49 PM	SiCl4 MFC set to  0.000000
3/7/2011	9:43:49 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:43:49 PM	Tube furnace set to 999
3/7/2011	9:52:09 PM	Helium valve closed
3/7/2011	9:52:09 PM	PH3 valve closed
3/7/2011	9:52:09 PM	Main Vac valve closed
3/7/2011	9:52:09 PM	Bypass valve closed
3/7/2011	9:52:09 PM	H2 valve opened
3/7/2011	9:52:09 PM	BCl3 valve opened
3/7/2011	9:52:09 PM	SiCl4 pre valve opened
3/7/2011	9:52:09 PM	SiCl4 post valve opened
3/7/2011	9:52:09 PM	Bubbler valve opened
3/7/2011	9:52:09 PM	Helium MFC set to  0.000000
3/7/2011	9:52:09 PM	H2 MFC set to  498.000000
3/7/2011	9:52:09 PM	BCl3 MFC set to  2.500000
3/7/2011	9:52:09 PM	PHl3 MFC set to  0.000000
3/7/2011	9:52:09 PM	SiCl4 MFC set to  52.000000
3/7/2011	9:52:09 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	9:52:09 PM	Tube furnace set to 1000
3/7/2011	10:10:09 PM	Helium valve closed
3/7/2011	10:10:09 PM	BCl3 valve closed
3/7/2011	10:10:09 PM	PH3 valve closed
3/7/2011	10:10:09 PM	SiCl4 pre valve closed
3/7/2011	10:10:09 PM	SiCl4 post valve closed
3/7/2011	10:10:09 PM	Main Vac valve closed
3/7/2011	10:10:09 PM	Bypass valve closed
3/7/2011	10:10:09 PM	H2 valve opened
3/7/2011	10:10:09 PM	Bubbler valve opened
3/7/2011	10:10:09 PM	Helium MFC set to  0.000000
3/7/2011	10:10:09 PM	H2 MFC set to  500.000000
3/7/2011	10:10:09 PM	BCl3 MFC set to  0.000000
3/7/2011	10:10:09 PM	PHl3 MFC set to  0.000000
3/7/2011	10:10:09 PM	SiCl4 MFC set to  0.000000
3/7/2011	10:10:09 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:10:09 PM	Tube furnace set to 0
3/7/2011	10:13:07 PM	H2 valve closed
3/7/2011	10:13:07 PM	BCl3 valve closed
3/7/2011	10:13:07 PM	PH3 valve closed
3/7/2011	10:13:07 PM	SiCl4 pre valve closed
3/7/2011	10:13:07 PM	SiCl4 post valve closed
3/7/2011	10:13:07 PM	Main Vac valve closed
3/7/2011	10:13:07 PM	Bypass valve closed
3/7/2011	10:13:07 PM	Helium valve opened
3/7/2011	10:13:07 PM	Bubbler valve opened
3/7/2011	10:13:07 PM	Helium MFC set to  400.000000
3/7/2011	10:13:07 PM	H2 MFC set to  0.000000
3/7/2011	10:13:07 PM	BCl3 MFC set to  0.000000
3/7/2011	10:13:07 PM	PHl3 MFC set to  0.000000
3/7/2011	10:13:07 PM	SiCl4 MFC set to  0.000000
3/7/2011	10:13:07 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:13:07 PM	Tube furnace set to 0
3/7/2011	10:33:07 PM	Helium valve closed
3/7/2011	10:33:07 PM	H2 valve closed
3/7/2011	10:33:07 PM	BCl3 valve closed
3/7/2011	10:33:07 PM	PH3 valve closed
3/7/2011	10:33:07 PM	SiCl4 pre valve closed
3/7/2011	10:33:07 PM	SiCl4 post valve closed
3/7/2011	10:33:07 PM	Main Vac valve closed
3/7/2011	10:33:07 PM	Bypass valve closed
3/7/2011	10:33:07 PM	Bubbler valve closed
3/7/2011	10:33:07 PM	Helium MFC set to  0.000000
3/7/2011	10:33:07 PM	H2 MFC set to  0.000000
3/7/2011	10:33:07 PM	BCl3 MFC set to  0.000000
3/7/2011	10:33:07 PM	PHl3 MFC set to  0.000000
3/7/2011	10:33:07 PM	SiCl4 MFC set to  0.000000
3/7/2011	10:33:07 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:33:07 PM	Tube furnace set to 0
3/7/2011	10:33:07 PM	Run finished at 10:33 PM
3/7/2011	10:39:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/7/2011	10:39:11 PM	Recipe started at 10:39 PM
3/7/2011	10:39:12 PM	Helium valve closed
3/7/2011	10:39:12 PM	H2 valve closed
3/7/2011	10:39:12 PM	BCl3 valve closed
3/7/2011	10:39:12 PM	PH3 valve closed
3/7/2011	10:39:12 PM	SiCl4 pre valve closed
3/7/2011	10:39:12 PM	SiCl4 post valve closed
3/7/2011	10:39:12 PM	Main Vac valve closed
3/7/2011	10:39:12 PM	Bubbler valve closed
3/7/2011	10:39:12 PM	Bypass valve opened
3/7/2011	10:39:12 PM	Helium MFC set to  0.000000
3/7/2011	10:39:12 PM	H2 MFC set to  0.000000
3/7/2011	10:39:12 PM	BCl3 MFC set to  0.000000
3/7/2011	10:39:12 PM	PHl3 MFC set to  0.000000
3/7/2011	10:39:12 PM	SiCl4 MFC set to  0.000000
3/7/2011	10:39:12 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:39:12 PM	Tube furnace set to 0
3/7/2011	10:39:45 PM	Helium valve closed
3/7/2011	10:39:45 PM	H2 valve closed
3/7/2011	10:39:45 PM	BCl3 valve closed
3/7/2011	10:39:45 PM	PH3 valve closed
3/7/2011	10:39:45 PM	SiCl4 pre valve closed
3/7/2011	10:39:45 PM	SiCl4 post valve closed
3/7/2011	10:39:45 PM	Bubbler valve closed
3/7/2011	10:39:45 PM	Main Vac valve opened
3/7/2011	10:39:45 PM	Bypass valve opened
3/7/2011	10:39:45 PM	Helium MFC set to  0.000000
3/7/2011	10:39:45 PM	H2 MFC set to  0.000000
3/7/2011	10:39:45 PM	BCl3 MFC set to  0.000000
3/7/2011	10:39:45 PM	PHl3 MFC set to  0.000000
3/7/2011	10:39:45 PM	SiCl4 MFC set to  0.000000
3/7/2011	10:39:45 PM	Bypass solenoid MFC set to  0.000000
3/7/2011	10:39:45 PM	Tube furnace set to 0
3/7/2011	10:39:45 PM	Run finished at 10:39 PM
3/7/2011	10:39:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
